Production line system and automated warehouse used in the system

Abstract

A production line system (1) comprises a core apparatus (10) of a stacker crane form and various processing lines (20, ..., 110) for performing various processes on a glass substrate that is received in a substrate receiving cassette stored in the core apparatus (10) and connected at plural loading / unloading positions (C1, C2) of the core apparatus (10) through a substrate loading / unloading mechanism (16a, 16b). At this time, the processing lines (20, ..., 90) are production lines that are used to perform various process for producing color filters, wherein the processing lines (20, ..., 70) are main screen-making lines for performing the processing steps including photolithography process, while the processing line (90) is a reserve screen-making line for performing the same process. Further, processing line (100) is a substrate inspection line that inspects a processed glass substrate that has been processed in the processing lines (20, ..., 90), and the processing line (110) is a substrate regeneration line that regenerates a glass substrate in which a defect was detected. Further, in a conveying path (15) of the processing lines (30, ..., 70), common defect inspection machines (39-77) are arranged for inspecting a common defect occurring at the same position in a plurality of glass substrates of the processed object. Further, the cassette that is stored and conveyed by the core apparatus (10) is preferably a frame line type cassettes that uses a plurality of frame lines suspending between left and right frames to support the substrate in a horizontal status.

Description

technical field [0001] The present invention relates to a production line system for producing plate-shaped products such as color filter sheets, and more particularly, to a production line system for producing plate-shaped products by using a box for accommodating a plurality of substrates (plate-shaped materials) and the system. Various logistics equipment used (automatic warehouse of stacking lifting method, substrate storage device, substrate discharge device). Background technique [0002] The manufacturing process of a color filter includes (1) chrome film formation, (2) formation of a black matrix, (3) formation of colored layers of each color (red, green, and blue) having a predetermined pattern, (4) Formation of a protective layer, (5) Formation of a columnar body, (6) Multiple processing steps of formation of an ITO layer. [0003] Here, conventionally, as a line system for realizing such a manufacturing process, a tandem type line system in which a plurality of p...

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Problems solved by technology

[0010] However, in the method described in the above-mentioned Japanese Patent Application Laid-Open No. 7-281171, although the pass rate of the product can be improved to some extent, the content of the inspection is mainly based on the premise of individual defects, and there is a problem that the degree of improvement is limited.

In addition, since the structure of the production line system equipped with the inspection machine is to connect multiple processing steps in series, when a defect is detected by the inspection machine, it is necessary to temporarily stop the entire production line system in order to find out the cause of the defect or eliminate it. There are many, so there is a problem that it is difficult to maintain a high operating rate of the production line

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