Etching composition

A composition and etching technology, applied in the direction of clamping, supporting, positioning device, etc., can solve the problems of unstable ferric chloride, easy to be decomposed by hydrochloric acid, and the influence of Mo series

Active Publication Date: 2005-09-21
DONGJIN SEMICHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Although the above hydrochloric acid + acetic acid aqueous solution has no effect on other metal wiring, it has the problem of large changes over time and slow etching speed; the hydrochloric acid + nitric acid + acetic acid aqueous solution has the problem of affecting other metal wiring, especially the Mo series.
Although the etching speed of ferric chloride aqueous solution is fast, there is a problem that ferric chloride is unstable and easily decomposed by hydrochloric acid.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] 12% by mass of hydrochloric acid, 3% by mass of acetic acid, 0.1% by mass of NH as additives 4 NO 3 and the rest of the ultrapure water were evenly mixed to produce an etching composition.

Embodiment 2～4 and comparative example 1～4

[0041] An etching composition was produced in the same manner as in Example 1 except that the composition was shown in Table 1 below.

[0042] Form a transparent conductive film (ITO film) by sputtering on a glass substrate, coat a photoresist and develop it, and fix the etching compositions of the above-mentioned Examples 1 to 4 and Comparative Examples 1 to 4 at 45° C. After the patterned test piece was dipped for 90 seconds, the measured etching performance results are shown in Table 1 below. The unit in Table 1 is % by weight.

[0043] Classification

[0044] It can be seen from Table 1 that, compared with Comparative Examples 1-4, the descum removal efficiency of the etching compositions in Examples 1-4 produced by the present invention is better.

Embodiment 5～13

[0046] As shown in Table 2 below, when 15% by mass of hydrochloric acid, 5% by mass of acetic acid, and 1.0% by mass of NH 4 NO 3 In the etching composition composed of the remaining amount of ultrapure water, ammonium perfluorooctane sulfonate is used as a fluorine-based anionic surfactant, and 0ppm, 50ppm, 100ppm, 300ppm, 500ppm, and 1000ppm are added respectively, and uniformly mixed to form an etching composition thing. The unit in Table 2 is % by weight.

[0047] Classification

Example

5

6

7

8

9

10

11

12

13

hydrochloric acid

15

15

15

15

15

15

15

15

15

Acetic acid

5

5

5

5

5

5

5

5

5

Additives (NH 4 NO 3 )

1

1

1

1

1

1

1

1

1

Surfactant

0ppm

10ppm

30ppm

50ppm

70ppm

100ppm

300ppm

500ppm

1000ppm

Ultra-pure water

Add to 100% by mass

...

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PUM

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Abstract

To provide an etching composition for a thin-film transistor liquid-crystal display device employed for selective etching of a transparent conductive film (such as an ITO film) of the thin-film transistor liquid-crystal display, the etching composition having a property of a low aging rate, minimizing the influence on other metal wirings so that a stable etching can be effected, and having a high etching rate and the capability of reducing side etching.

Description

technical field [0001] The invention relates to an etching composition for a thin film transistor liquid crystal display device, which is used for selectively etching a transparent conductive film (ITO film) of a thin film transistor liquid crystal display device (TFT LCD), in more detail, the involved thin film transistor The etching composition of the liquid crystal display device has little change over time, minimizes the influence on other metal wiring, can perform etching stably, has a fast etching speed, and reduces side etching. Background technique [0002] Transparent conductive films are widely used in display devices for flat displays such as LCDs and PDPs. Generally speaking, a display device is an electro-optical device that converts electrical signals into visual images, allowing people to directly distinguish information. [0003] In such a display device, the liquid crystal display device changes the arrangement of liquid crystal molecules by applying an ele...

Claims

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Application Information

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IPC IPC(8): G02F1/1368G02F1/136G03F7/004H01L21/027H01L21/306H01L21/3205H01L21/3213H01L23/52
CPCC09K13/06C09K13/04G02F1/136C11D2111/22H01L21/30604H01L21/31111
Inventor 李骐范曹三永李敏键申贤哲
Owner DONGJIN SEMICHEM CO LTD
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