Grinding liquid composition
The technology of a composition and abrasive liquid is applied in the direction of polishing compositions containing abrasives, other chemical processes, chemical instruments and methods, etc., and can solve problems such as long processing time, uncertain micro-ripples, and impossibility to reduce micro-ripples, etc. Achieve the effect of increasing storage capacity and reducing tiny ripples
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Embodiment I-1~I-7、 comparative example I-1~I-2
[0089] [Preparation Method of Polishing Liquid Composition]
[0090] ·Preparation method I-1
[0091] 16 parts by weight of abrasive material (α-alumina (alumina purity of 99.9%) with an average particle size of primary particles of 0.23 μm and an average particle size of secondary particles of 0.45 μm), 4 parts by weight of intermediate alumina (θ - Aluminum oxide with an average particle size of 0.2 μm and a specific surface area of 150m 2 / g, the alumina purity is 99.9%), 0.5 parts by weight of itaconic acid, 3 parts by weight of citric acid, the specified amount of micro-ripple reducer shown in Table 1, and the rest of the ingredients are ion-exchanged water, mixed and stirred to obtain 100 parts by weight of the polishing liquid composition. When grinding, the polishing liquid composition was diluted (Vol / Vol) with 4 times the amount of ion-exchanged water and used.
[0092] ·Preparation method I-2
[0093] 16 parts by weight of grinding material (the average partic...
Embodiment II-1~II-2、 comparative example II-1
[0119] [Polishing liquid composition preparation method II-1]
[0120] 16 parts by weight of abrasive material (α-alumina (purity: 99.9%) with an average particle size of primary particles of 0.23 μm and an average particle size of secondary particles of 0.8 μm), 4 parts by weight of intermediate alumina (θ-oxidized Aluminum, average particle size 0.2μm, specific surface area 150m 2 / g, the purity is 99.9%), 0.5 parts by weight of itaconic acid, 0.5 parts by weight of ammonium sulfate, 0.08 parts by weight of "Demol EP" (manufactured by Kao Co., Ltd.) as a surfactant, and the specified amount shown in Table 3 micro-ripple reducer, and the remaining components are ion-exchanged water, mixed and stirred to obtain 100 parts by weight of a polishing liquid composition. When polishing, the polishing liquid composition was diluted (Vol / Vol) with 4 times the amount of ion-exchanged water and used.
[0121] [grinding method]
[0122] Using a double-sided processing machine, the cen...
Embodiment II-3、 comparative example II-2
[0139] [Polishing liquid composition preparation method II-2]
[0140] 16 parts by weight of abrasive material (α-alumina (purity: 99.9%) with an average particle size of primary particles of 0.23 μm and an average particle size of secondary particles of 0.8 μm), 4 parts by weight of intermediate alumina (θ-alumina Aluminum, average particle size 0.2μm, specific surface area 150m 2 / g, the purity is 99.9%), 0.5 parts by weight of itaconic acid, the micro-ripple reducing agent shown in Table 4, and the remaining components are ion-exchanged water, mixed and stirred to obtain 100 parts by weight of the polishing liquid composition. Using the obtained polishing liquid composition, polishing was carried out in the same manner as in Example II-1. When polishing, the polishing liquid composition was diluted (Vol / Vol) with 4 times the amount of ion-exchanged water and used.
[0141] Table 4
[0142] The results are shown in Table 4. The value of each micro-waviness is shown as a ...
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