Transparent laminate having low emissivity

A low-radiation, multi-layer body technology, applied in coating, layered products, sputtering coating, etc., can solve problems such as unstable pressure, uneven film quality, unstable spraying rate, etc., to improve durability and wear resistance, crystallization inhibition effect

Inactive Publication Date: 2004-02-18
CARDINAL CG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In the invention proposed in the aforementioned Japanese Patent Laid-Open No. 9-71441, three methods are listed as methods for reducing the grain size of the metal oxide layer. 1) A method of using a Zn target and increasing the pressure of the sputtering gas ; 2) adopt Zn target, the method for mixing nitrogen in the oxygen as sputtering gas; 3) adopt the ZnO target that is coated with Al, use the method for the argon sputtering of adding several percentage points of oxygen, but there is this class problem: In the above method 1), due to the high pressure of the spraying gas, the pressure in the spraying device is unstable and the film quality is uneven; in the above method 2), the spraying rate is unstable and the film quality is uneven; in the above method 3) Medium, high cost of spraying
[0010] In addition, the test results show that although SiN x 、TiO 2 or SiAlO x N y (Sialon polymer material) and other protective films are amorphous, and the grain boundaries are not aligned in the thickness direction. However, when the crystal orientation of the dielectric layer formed outside the metal layer is high, the metal layer cannot be sufficiently suppressed. deterioration

Method used

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  • Transparent laminate having low emissivity
  • Transparent laminate having low emissivity
  • Transparent laminate having low emissivity

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] use Figure 11 The shown load-locked linear magnetron spraying device with 5 sets of cathodes will figure 1 The structure shown, that is, glass / ZnO / Ag / ZnO / SiN x / ZnO / SiN x A low-emissivity transparent multilayer body composed of a dielectric / silver / dielectric interlayer structure is formed into a film on one side surface of a common float glass with a thickness of 3mm×2500mm×1800mm.

[0051] From Figure 11 The inlet of the spraying device shown conveys the cleaned plate glass (G) to the load lock chamber (1), vacuum exhausts to a predetermined pressure, and conveys it to the coating chamber (2), after which the spraying gas is introduced into In the coating chamber (2), it is adjusted to a predetermined pressure balanced with the exhaust pump, and then the cathode (3) is energized to generate discharge, and the material set on each cathode is sprayed to form a film.

[0052] In addition, in this example, the glass was not particularly heated at the time of plating...

Embodiment 2

[0060] Utilize and embodiment 1 same sputtering apparatus, will and image 3 The same structure, that is, glass / ZnO / Ag / TiO x / ZnO / SiN x / ZnO / Ag / TiO x / ZnO / SiN x The low-emissivity transparent multilayer body composed of dielectric / silver / dielectric / silver / dielectric interlayer structure is formed into a film on one side surface of the same float glass in the following manner.

[0061] First, introduce oxygen into the chamber to make the pressure 0.40Pa, pass a direct current of 55kW to the cathode (3b) with a zinc target (size: 3100mm×330mm) to produce reactive spraying, and move the glass back and forth under the cathode , forming a zinc oxide film as the first layer.

[0062] Then, the gas in the chamber is switched to argon, and its pressure is 0.45Pa, and a direct current of 8kW is passed to the cathode (3c) provided with a silver target (size: 3100mm×330mm), while a titanium target (size: 3100mm) is provided. × 330 mm) of the cathode (3d) 8kW direct current, by passi...

Embodiment 3

[0067] Utilize and embodiment 1 identical sputtering device, will and Figure 5The same structure, that is, glass / ZnO / Ag / TiO x / ZnO / SiN x / ZnO / SiN x / ZnO / Ag / TiO x / ZnO / SiN x A low-emissivity transparent multilayer body having a sandwich structure of dielectric / silver / dielectric / silver / dielectric was formed on one surface of the same float glass as follows.

[0068] Using the same method as in Example 2, the zinc oxide film of the first layer, the silver film of the second layer, the titanium film of the third layer (after functioning as a sacrificial layer, it becomes a titanium oxide film), the fourth layer of Zinc oxide film, aluminum-added silicon nitride film in the fifth layer, and zinc oxide film in the sixth layer.

[0069] Next, the aluminum-added silicon nitride film of the seventh layer and the zinc oxide film of the eighth layer are formed by the same method as the fifth layer and the sixth layer, and then, the second layer, the third layer, and the fourth laye...

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Abstract

A transparent laminate having low emissivity which has one or more dielectric layers such as a zinc oxide (ZnO) film and one or more metal layers such as a silver (Ag) film being laminated on one another, characterized in that at least one dielectric layer is divided in the direction of film thickness by at least one amorphous layer. The transparent laminate having low emissivity exhibits improved durability of the metal layer, since the formation of a zinc oxide film as a dielectric layer on an amorphous layer causes the collapse of the columnar crystal structure of zinc oxide and, as a result, not only the amorphous layer but also the dielectric layer act also as a barrier preventing the entry of moisture or a gas.

Description

technical field [0001] The present invention relates to a low emissivity transparent multilayer body used as multilayer glass, laminated glass, transparent plate with electromagnetic wave control function, flat heating element and transparent electrode. Background technique [0002] It is known that these are disclosed in JP-A-63-30212, JP-A-63-134232 or JP-A-63-239044, etc., as low-emissivity transparent materials for realizing sun-shielding and high-insulation mechanisms. Multi-layer body. [0003] This low-emissivity transparent multilayer body is formed by laminating a total of (2n+1) dielectric layers and metal layers on a transparent substrate, and a protective layer is formed on the uppermost layer. Zinc oxide is known to have an excellent film-forming speed as a dielectric layer, and silver is known to have an excellent radiation reflection function as a metal layer. [0004] In addition, it is known that SiN x 、TiO 2 or SiAlO x N y (silicon aluminum oxynitride...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B17/10C03C17/36
CPCC03C17/366C03C17/36C03C2217/281C03C17/3652C03C17/3681C03C2217/216B32B17/10174C03C17/3639C03C17/3618C03C17/3644C03C2217/78C03C17/3626Y10T428/265B32B9/00
Inventor 村田健治堂下和宏中井日出海
Owner CARDINAL CG
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