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Humidity sensor element and method for manufacture thereof

A technology of humidity sensor and manufacturing method, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., and can solve problems such as substrate peeling and cracks

Inactive Publication Date: 2003-11-26
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the above-mentioned cross-linking method, since the polymer layer is water-supplied, the expansion is extremely large, and major problems such as cracks and peeling from the substrate will occur. Therefore, in reality, the thickness of the film has to be kept below 1 μm

Method used

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  • Humidity sensor element and method for manufacture thereof
  • Humidity sensor element and method for manufacture thereof
  • Humidity sensor element and method for manufacture thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0372] First, the monomer of formula (2) is synthesized.

[0373] Make N, N, N: N'-tetramethyl-1,12-dodecanediamine 3.62g (21.0mmol) and 1,12-dibromododecane 6.92g (21.1mmol) in 20.2g of methanol The reaction was carried out at 110°C for 48 hours, and 9.04 g of white precipitate was reprecipitated with acetone. Then, 6.92 g of white precipitates and 3.54 g of dimethylaminopropylmethacrylamide were reacted in methanol at 90° C. for 24 hours, and reprecipitation was repeated in acetone to obtain 5.47 g of pale yellow precipitates. The number average molecular weight is about 5000.

[0374] Next, the monomer of formula (1) was synthesized.

[0375] 11.82 g (75.2 mmol) of dimethylaminoethyl methacrylate and 4.23 g (37.4 mmol) of 1,3-dichloropropane were dissolved in 21.04 g of acetonitrile, and 4-methoxyphenol was added as a polymerization inhibitor After 0.27 g, react at 60° C. for 120 hours, and reprecipitate with 1000 ml of acetone to obtain 17.52 g of quaternary ammonium sa...

Embodiment 2

[0390] In the same way as in Example 1, an aluminum oxide substrate with a comb-shaped electrode is made in advance, and 1% (mass percent) acetic acid aqueous solution of γ-methacryloxypropyltrimethoxysilane (KBM503 manufactured by Shin-Etsu Chemical) is used After drying, place it at 120°C for 20 minutes to introduce acryloyl groups on the surface of the substrate. Then, it was dipped in the same moisture-sensitive film-forming monomer liquid as in Example 1 to form a coating film. Then, similar to Example 1, ultraviolet rays were irradiated, polymerized, and cross-linked to obtain a humidity sensor element.

[0391] The evaluation of the output characteristics of the humidity sensor element thus obtained and the water resistance test were carried out in the same manner as in Example 1. The obtained output characteristics were measured as Figure 4 As shown, the water resistance test results are as follows Figure 5 shown.

[0392] Figure 4 and Figure 5 The results sh...

Embodiment 3

[0395] First, the monomer of formula (2) is synthesized.

[0396] Dissolve 6.30g (36.6mmol) of N,N,N',N'-tetramethyl-1,12-dodecanediamine and 9.62g (40.2mmol) of 1,12-dichlorododecane in 23g of In methanol, reflux in an eggplant-shaped flask. The temperature of the oil bath at this time was 110°C. After 36 hours of reaction, it was confirmed that the solution became cloudy white. After 48 hours, the reaction was stopped, and 40 ml of methanol was added to the white viscous solution. There was no insoluble matter, but after filtering once, a white precipitate was obtained through repeated re-precipitation operations. The amount of acetone used was 500ml. The weight after drying was 6.04 g. Then, 5.07 g of the white precipitate was dissolved in 9 g of methanol. Further, 2.98 g of dimethylaminopropyl methacrylamide was added thereto, and the temperature of the oil bath was 90° C., and the reaction was carried out for 24 hours. The solution is dark orange viscous. 20 ml of...

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Abstract

A humidity sensor element which has an electrical insulator substrate, a pair of electrodes being disposed thereon opposite to each other via a gap, and a humidity-sensitive thin film formed on the gap, wherein the humidity-sensitive thin film comprises a polymer or a copolymer derived from a monomer having the formula (1): (1) wherein A11 is a divalent group, R11 to R14 are each an alkyl group, Y11 and Y12 are each a monovalent group having an ethylenically unsaturated reactive group at the terminal thereof, arbitrary two or more of R11 to R14, Y11, Y12, A11 and a part of the nitrogen atom (N) side of them may form a ring together with a nitrogen atom (N), and X11<-> and X12<-> are each an anion, and the substrate is optionally subjected to a treatment by a physical means or the like; and a method for manufacturing the humidity sensor element. The humidity sensor element is used for detecting and determining the moisture in an atmosphere, and is excellent in the resistance to water, a solvent and a gas, is free from hysteresis over a wide range of humidity, and has stable output characteristics.

Description

technical field [0001] The present invention relates to a humidity sensor element for detecting and quantifying moisture in the atmosphere and a method of manufacturing the same. Background technique [0002] As materials for humidity sensors that detect humidity based on changes in electrical properties such as resistance values, materials using electrolytes such as lithium chloride, materials using metal oxides, and materials using organic polymer compounds are known. [0003] However, electrolyte elements such as lithium chloride have a narrow detection humidity range, and their characteristics change due to fogging or water leakage, so their water resistance is poor. In addition, elements using metal oxides have good water resistance but low sensitivity and poor long-term use stability. They must be equipped with heating and cleaning circuits, so they have the disadvantages of high shipping costs and complicated structures. [0004] In addition, among materials for humi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/121G01N27/126
Inventor 涩江明南波宪良
Owner TDK CORPARATION
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