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Reflection-type diffraction grating

A diffraction grating, reflective technology, applied in the directions of diffraction grating, optics, optical components, etc., can solve the problems of reduced light intensity, complex optical system, insertion loss, etc.

Inactive Publication Date: 2002-04-17
NIPPON SHEET GLASS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the proposed method, since several devices are inserted, the inserted devices as well as the optical system become complicated, causing insertion loss
There is a problem of reducing the intensity of light

Method used

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Examples

Experimental program
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Effect test

example 1

[0024] The fine roughness of the diffraction grating of the present invention was produced in the following manner.

[0025] First, a soluble solution containing the liquid hydrolyzate of methyltriethoxysilane as the main component was added to the figure 1 The glass substrate 10 shown. This soluble solution added substrate 10 was molded while using a brass replica, which was subjected to a mold release process, and which is commercially available, as a stamping film. Then, mold release processing and baking are performed, whereby a fine rough structure 12 is obtained to be used as a diffraction grating. The depth of each rough groove is about 1 μm. Aluminum was vacuum-deposited on the fine roughness to form a metal film 14 with a thickness of 100 nm. Relative to unpolarized light, the reflectivity of the aluminum film is not less than 90%. Silicon dioxide (SiO 2 ) and titanium dioxide (TiO 2 ) was vacuum-deposited on the aluminum film to form an insulating film 16 consi...

example 2

[0029] aluminum and magnesium fluoride (MgF 2) were deposited on a commercially available holographic replica diffraction grating (900 / mm, provided with a reflective aluminum film formed thereon), thereby forming two thin films with thicknesses of 100 nm and 250 nm, respectively. That is, there are two kinds of metal films in this example (an aluminum film that was originally placed on the hologram replica diffraction grating and an aluminum film that was deposited on the hologram replica diffraction grating). The diffraction efficiency of the thus obtained diffraction grating with respect to a wavelength of 1550 nm was measured in the same manner as in Example 1. As a result, with respect to TE polarized light, the diffraction efficiency of the diffraction grating with a single-layer aluminum film is 32.8%, while with respect to TM polarized light, it is 82.5%, but with respect to TE polarized light, the diffraction efficiency with the aluminum layer The diffraction efficien...

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Abstract

A reflection type diffraction grating according to the present invention has a structure in which a metal film as a first layer with reflectance not lower than 30 % with respect to the wavelength of incident light and a transparent dielectric film as a second layer are laminated successively on the surface of the reflection type diffraction grating. With respect to the wavelength of incident light, the metal film has a refractive index selected to be not higher than 1.5 and an extinction coefficient selected to be not smaller than 6.0. The transparent dielectric film has a refractive index selected to be in a range of from 1.30 to 1.46, both inclusively, with respect to the wavelength of incident light and has an optical film thickness selected to be in a range of from 0.20 lambda to 0.38 lambda , both inclusively, when lambda is the wavelength of incident light.

Description

technical field [0001] The invention relates to spectroscopic optical devices, especially reflective diffractive optical devices, which are widely used in the field of optical technology, such as optical sensors, information recording devices, optical measuring devices and the like. Background technique [0002] Diffraction gratings are commonly used as spectroscopic optics or optical demultiplexing devices. Among these diffraction gratings, reflective diffraction gratings that use refracted light as reflected light are often constructed by forming a metal film on the surface of an element having periodically formed grooves in order to improve reflection. The reflection efficiency of the type diffraction grating. A high reflectance material such as aluminum, gold or the like is used as a metal film disposed on the surface of the element having grooves grooved in a periodic manner. [0003] If such reflective metal films are used in a state of being exposed to the surroundi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
CPCG02B5/1861G02B5/18
Inventor 新毛胜秀河本真司国定照房仲间健一
Owner NIPPON SHEET GLASS CO LTD
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