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Method for measuring light-beam central position by array CCD

A center position, measuring beam technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of wide range of application requirements and difficult implementation

Inactive Publication Date: 2007-08-22
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The accuracy of angle measurement is 3-6", and the effective resolution reaches 1". The application requirements of digital automatic measuring devices are wide, and it is difficult to realize it with methods other than circular grating technology.

Method used

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  • Method for measuring light-beam central position by array CCD
  • Method for measuring light-beam central position by array CCD
  • Method for measuring light-beam central position by array CCD

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Embodiment Construction

[0045] The method for measuring beam center position with linear array CCD described in the present invention and according to this method carry out rotating mirror angle measurement, impact circuit meter rotating mirror dynamic deflection angle measurement, displacement measurement, 0~360 degree angle measurement and linear visible spectrum Specific instructions for wavelength measurement are as follows:

[0046] 1. The method of measuring the center position of the beam with a linear array CCD

[0047] 1.1 Beam radiation power density distribution using quasi-Gaussian distribution

[0048]The Gaussian distribution is a distribution that is closer to the radiation power density distribution of the common beam cross-section, and it is also a distribution that is easier to approximate. Set the distance between the centers of adjacent pixels of the CCD detector as W (pixel spacing). Let the radiation power line density on the receiving surface be a Gaussian distribution

[00...

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Abstract

A method of using linear array CCD to measure central position of light beam includes presenting radiation power density of CCD surface light spot in Gaussian or quasi-Gaussian distribution , setting error limit and selecting end-off threshold of digital signal output by CCD and relative circuits , applying weighted- regression method to calculate out estimation value of central position for effective digital signal of end-off quasi-Gaussian distribution and using Monte Carlo figure to simulate error distribution for setting out width range of light beam .

Description

technical field [0001] The invention relates to a new photoelectric measurement method for measuring the central position of a light beam incident on the surface of a linear array CCD, and a specific method for measuring linear displacement, length, angular displacement, angle, etc. by using this method, which belongs to the geometric quantity measurement method and The technical field of the instrument; it can also be applied to other types of measured measurements that can be converted into displacements and angles, such as measuring the magnetic flux density through the deflection angle of the shock galvanometer rotating mirror, passing the measured spectral line on the spectral surface Position measurement spectral line wavelength, etc. Background technique [0002] In the previous measurement technology using linear array CCD, most of the effective resolution corresponds to 1 pixel interval W, and the report of individual sub-pixel resolution technology can only reduce ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B11/26G01B21/02
Inventor 朱鹤年
Owner TSINGHUA UNIV
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