Capacitance type pressure sensing element structure and mfg. method
A manufacturing method and sensing element technology, applied in electrical digital data processing, character and pattern recognition, instruments, etc., can solve problems such as poor effect, complex composition materials, sensor noise, etc., to improve sensing effect and reduce thickness Effect
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[0031] FIG. 1 shows a cross-sectional view of a capacitive pressure sensing element structure according to a preferred embodiment of the present invention.
[0032] As shown in FIG. 1, the capacitive pressure sensing element 20 of this embodiment includes a base layer 301, a fixed lower electrode plate 303A, a floating upper electrode plate 303B, a gap 303C, a first dielectric layer 304, a The upper metal composite layer 306 , a protection layer 307 , a plurality of etching holes 308 and sealing plug posts 309 .
[0033] A plurality of lower metal plug posts 302 and related circuit components are formed in the base layer 301 . The fixed lower electrode plate 303A is fixed on the base layer 301 and electrically connected to the lower metal plug posts 302 . The fixed lower electrode plate 303A is made of a titanium or titanium nitride material. Similarly, the floating upper electrode plate 303B is made of a titanium or titanium nitride material, and is suspended above the fixe...
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