Heating device for chip mounting process
A heating device and process technology, applied to the cleaning method using tools, the cleaning method using gas flow, cleaning methods and utensils, etc., can solve the problems of difficult maintenance, easy to block suction holes, and affect the adsorption effect of the substrate, etc., to achieve Improved convenience and enhanced impurity removal effect
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[0032] like Figure 1-9 As shown in the figure, a heating device used for a film loading process in this embodiment includes a horizontally arranged bottom plate 1, and the bottom plate 1 is provided with a heating system and a through hole 2, and the through hole 2 is parallel to the front-rear direction, The front end of the through hole 2 is installed with a joint 3, the rear end of the through hole 2 is sealed with a sealing block 4, the top of the bottom plate 1 is provided with a plurality of suction holes 5, and the plurality of suction holes 5 are arranged in the front and rear of the seal. Between the block 4 and the joint 3, the axis of the suction hole 5 is arranged vertically, the suction hole 5 communicates with the through hole 2, and the bottom plate 1 is provided with a cleaning mechanism and a dredging mechanism;
[0033] The cleaning mechanism includes a cleaning brush 6, an air blowing component and two translation components. The cleaning brush 6 is located...
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