Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Material suction cup machining method of curved surface photoetching machine

A processing method and technology of lithography machine, applied in the field of mechanical processing, can solve the problems of difficulty in guaranteeing the quality of parts, high defect rate of product quality, affecting the qualified rate of products, etc. The effect of improving processing quality and processing efficiency

Pending Publication Date: 2022-06-21
无锡汉纳科技有限公司
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Since the material sucker is arc-shaped on one side and has a stepped cavity inside, the volume is large and the shape is irregular, the processing is complicated and easy to deform
However, the material suction cup of the existing curved surface lithography machine has complicated processing technology and cumbersome procedures, and it is difficult to guarantee the quality of the parts during processing, resulting in a high rate of product quality defects, which not only leads to low production efficiency, but also affects the product qualification rate

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Material suction cup machining method of curved surface photoetching machine
  • Material suction cup machining method of curved surface photoetching machine
  • Material suction cup machining method of curved surface photoetching machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0031] see Figure 1-4 , a material suction cup processing method of a curved lithography machine, comprising a base part 1, the base part 1 comprising a circular arc surface 11 and a cavity surface 12, including the following processing steps:

[0032] S1. Process the six vertical surfaces of the cavity surface 12 from the billet aluminum block of the base piece 1, mill the upper and lower planes to make allowances, and use the pressure plate 2 to fix the base piece 1 on the worktable of the machining center (refer to figure 1 ), the arc surface 11 is pre-processed, and a unilateral allowance is reserved;

[0033] Among them, the reserved allowance for milling the vertical plane on the six sides is 0.4~0.6mm, and the unilateral allowance for the initial processing arc surface 11 is 0.9~1.1mm, so as to prevent the deformation in the later stage and ensure the overall processing accuracy;

[0034] S2. Clamp the base piece 1 with the flat-nose pliers 3 (refer to figure 2 ), f...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of machining, and discloses a material suction cup machining method of a curved-surface photoetching machine, which comprises the following machining steps: machining a blank aluminum block of a substrate into six vertical surfaces of a cavity surface, milling the upper and lower planes to reserve allowance, fixing the substrate on a machining center workbench by using a pressing plate, primarily machining an arc surface, and machining a material suction cup of the curved-surface photoetching machine. A single-side margin is reserved; 7075 aluminum alloy is selected as a part material, a machine tool is selected from a bucket mountain machining center (the model number is DNM4505), machining tools are selected, a tungsten steel alloy coating aluminum milling cutter with the diameter being 30 and the blade length being 160 is selected as a machining arc surface curved surface, a small hole drill bit on the curved surface is selected according to the drawing size, the diameter of a small hole is 1.5, the model number of the drill bit is NACHi (LIST6594P), and the clamping technology and the machining technology are optimized. Therefore, the overall machining precision of the material suction cup is effectively guaranteed, the product reject ratio is reduced, the machining efficiency is improved, the normal operation requirement of machined parts in a machine can be met, and the product quality of the material suction cup is improved.

Description

technical field [0001] The invention relates to the technical field of mechanical processing, in particular to a method for processing a material suction cup of a curved surface lithography machine. Background technique [0002] Mask Aligner, also known as: mask alignment exposure machine, exposure system, lithography system, etc., is the core equipment for manufacturing chips. It uses a technique similar to photo printing to print the fine patterns on the reticle onto the silicon wafer through the exposure of light. In the curved lithography machine, the material suction cup is one of the important components of the curved lithography machine. The main function of the suction cup is to absorb the glass workpiece and follow the drive motor to make the curved surface movement. Due to the processing of glass parts, the laser will be directly irradiated on the suction cup, and the suction cup should not be warped during long-term operation. High-precision contour requirements...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00
CPCB23P15/00
Inventor 郑玉龙韩虎王明宇
Owner 无锡汉纳科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com