C/SiC composite material crucible containing alpha-Al2O3 coating

A composite material and crucible technology is applied in the field of thermal field components for single crystal silicon drawing furnaces, which can solve the problems of not playing a substitute role, shortening the service life of the crucible, poor thermal shock resistance, etc., achieving significant economic benefits, avoiding mechanical Good damage and crystallization performance

Active Publication Date: 2022-05-10
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Patent CN 103553692 A discloses a method for preparing a carbon / silicon carbide composite material crucible. The carbon / silicon carbide composite material crucible is obtained by densifying the carbon fiber preform, liquid-phase siliconizing, and machining. The phase infiltration silicon process is formed at one time, and silicon carbide is used to replace the carbon of the carbon / carbon composite material matrix to improve the corrosion resistance of the carbon / carbon composite material, but it has not played a role in replacing the "carbon / carbon composite material crucible + quartz crucible" ; Patent CN 113200765 A discloses a CVD method to form a layer of Si on the surface of a carbon ceramic crucible 3 N 4 Composite coating with BN to improve the high temperature stability and silicon erosion resistance of the crucible, but Si 3 N 4 The coating has certain wettability to silicon, and the high density of the carbon ceramic crucible will lead to increased cost and poor thermal shock resistance, shortening the service life of the crucible

Method used

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  • C/SiC composite material crucible containing alpha-Al2O3 coating
  • C/SiC composite material crucible containing alpha-Al2O3 coating
  • C/SiC composite material crucible containing alpha-Al2O3 coating

Examples

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Effect test

Embodiment 1

[0028] A containing α-Al 2 o 3 The preparation steps of the coated C / SiC composite crucible are as follows:

[0029] (1) The bulk density is 0.40g / cm3 prepared in the form of axial carbon fiber non-weft cloth / carbon mesh tire composite layup and circumferential carbon fiber continuous winding layer alternately stacked and needle punched 3 carbon fiber prefabricated body;

[0030] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0031] (2) Place the carbon fiber preform in a chemical vapor deposition furnace, use trichloromethylsilane as the silicon source gas, the flow rate of the silicon source gas is 10L / min, the deposition temperature is 1100°C, and the single deposition time is 300h. Carried out 5 times of chemical ...

Embodiment 2

[0036] A containing α-Al 2 o 3 The preparation steps of the coated C / SiC composite crucible are as follows:

[0037] (1) The bulk density is 0.50g / cm3 prepared in the form of alternate superposition of axial carbon fiber non-woven fabric / carbon mesh tire composite layer and circumferential carbon fiber continuous winding layer. 3 carbon fiber prefabricated body;

[0038] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0039] (2) Place the carbon fiber preform in a chemical vapor deposition furnace, use trichloromethylsilane as the silicon source gas, the flow rate of the silicon source gas is 30L / min, the deposition temperature is 1200°C, and the single deposition time is 200h. Perform 3 chemical vapor depositions to o...

Embodiment 3

[0044] A containing α-Al 2 o 3 The preparation steps of the coated C / SiC composite crucible are as follows:

[0045] (1) The bulk density is 0.60g / cm3 prepared in the form of axial carbon fiber non-weft cloth / carbon mesh tire composite layup and circumferential carbon fiber continuous winding layer alternately stacked and needle punched 3 carbon fiber prefabricated body;

[0046] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0047] (2) Place the carbon fiber preform in a chemical vapor deposition furnace, use trichloromethylsilane as the silicon source gas, the flow rate of the silicon source gas is 50L / min, the deposition temperature is 1300°C, and the single deposition time is 150h. Perform 2 chemical vapor deposit...

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Abstract

The invention relates to a C/SiC composite crucible containing an alpha-Al2O3 coating, and belongs to the technical field of thermal field parts for monocrystalline silicon drawing furnaces. The composite material crucible comprises a C/SiC composite material crucible body and an alpha-Al2O3 coating, wherein the inner surface of the crucible body is coated with the alpha-Al2O3 coating; a ceramic matrix in the C/SiC composite material crucible body is beta-SiC; the alpha-Al2O3 coating and the beta-SiC ceramic matrix have good adaptability and high bonding strength, on the basis of meeting the mechanical property requirement of the crucible, on one hand, erosion of Si steam to the crucible is greatly reduced, on the other hand, mechanical damage to the composite material crucible is avoided, the service life of the crucible is prolonged, and the service life of the composite material crucible is prolonged. On one hand, impurity components are not introduced in the monocrystalline silicon drawing process, the purity of molten silicon in the monocrystalline silicon drawing process is guaranteed, the requirement for monocrystalline silicon drawing is met, and compared with the method for drawing monocrystalline silicon by using a quartz crucible and a carbon/carbon composite material crucible at the same time, the cost for drawing monocrystalline silicon by using the composite material crucible is reduced.

Description

technical field [0001] The present invention relates to a kind of containing α-Al 2 o 3 A coated C / SiC composite material crucible belongs to the technical field of thermal field components for single crystal silicon drawing furnaces. Background technique [0002] In the process of pulling single crystal silicon, the joint action of "carbon / carbon composite material crucible + quartz crucible" is generally used for pulling, such as figure 1 As shown, the silicon material is placed inside the quartz crucible, and then the quartz crucible is nested in the carbon / carbon composite material crucible. Due to the influence of the working environment when pulling single crystal silicon, the quartz crucible will be softened and deformed under high temperature, and it is not easy to separate from the carbon / carbon composite material crucible, so the old quartz crucible can only be broken and replaced with a new quartz crucible Only then can the next furnace be drawn. Therefore, on...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/80C04B35/565C30B15/10C30B29/06C04B41/87
CPCC04B35/80C04B35/571C30B15/10C30B29/06C04B41/87C04B41/5031C04B41/009C04B2235/608C04B2235/77C04B2235/96C04B41/4527
Inventor 程皓张永辉白鸽郁荣候雯菲康媛媛程凯峰
Owner XIAN CHAOMA SCI TECH
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