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Fourier transform spectrometer based on multilayer slab waveguide structure

A technology of Fourier transform and slab waveguide, applied in the field of optical sensing

Active Publication Date: 2022-04-19
挚感(苏州)光子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the problems existing in the existing single-mode waveguide Fourier transform spectrometer, the present invention provides a Fourier transform spectrometer based on a multilayer planar waveguide structure, solved the above problem

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  • Fourier transform spectrometer based on multilayer slab waveguide structure

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Embodiment 1

[0029] like figure 1As shown, a Fourier transform spectrometer based on a multilayer slab waveguide structure includes a slab waveguide chip 1, a light source 2, a light source lens group 2-1, a moving mirror 3, a moving mirror lens group 3-1, and a fixed mirror 4 , a fixed mirror lens group 4-1, a photodetector 5 and a detector lens group 5-1; the slab waveguide chip 1 includes a first core layer 1-1, a second core layer 1-2 and is arranged on the A cladding layer 1-3 between the first core layer 1-1 and the second core layer 1-2; the second core layer 1-2 is arranged above the first core layer 1-1; The second core layer 1-2 has two different thicknesses, which are respectively the first thickness L 1 and a second thickness L 2 , and the first thickness L 1 and a second thickness L 2 Arranged alternately (that is, the first thickness L appears alternately on the second core layer 1-2 1 and a second thickness L 2 ; The first thickness L appears alternately on the second ...

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Abstract

The invention discloses a Fourier transform spectrometer based on a multilayer slab waveguide structure. The Fourier transform spectrometer comprises a slab waveguide chip, a light source, a movable mirror, a fixed mirror and a photoelectric detector, the slab waveguide chip at least comprises two core layers and a cladding, one core layer at least has two different thicknesses, and one thickness is consistent with the thicknesses of the other core layers; a first reflector and a second reflector are respectively arranged at two ends of the core layers with different thicknesses; light beams emitted by the light source are converged into one core layer, and the movable mirror is used for reflecting the light beams emitted from the core layer back along the same path; the fixed mirror is arranged above the first reflector and receives the light beams reflected by the first reflector; the photoelectric detector is arranged above the second reflector and receives the light beam reflected by the second reflector to form a current signal. The core problem that an existing single-mode waveguide spectrometer cannot use a heat radiation light source such as a tungsten lamp is solved, and obstacles are cleared away for the situation that an on-chip spectrometer does not have engineering feasibility.

Description

technical field [0001] The invention relates to the technical field of optical sensing, in particular to a Fourier transform spectrometer based on a multilayer flat waveguide structure. Background technique [0002] Fourier transform spectrometer is a very important type of spectrometer. Its core structure is Michelson interferometer. The incident light is divided into two paths, one path passes through a movable lens (moving mirror), and the other path passes through a fixed position lens ( fixed mirror). The moving mirror moves with time, causing a modulation of the incident light. After the modulated light is incident on the object under test and then received, the Fourier transform can be done by using the position of the moving mirror and the received light intensity to obtain the spectral information of the object under test. Traditional Fourier spectrometers usually use thermal radiation light sources such as tungsten lamps and mercury lamps. These light sources hav...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01G01N21/27
CPCG01N21/01G01N21/27
Inventor 王磊
Owner 挚感(苏州)光子科技有限公司
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