Optical switch based on quantum-confined Stark effect
A technology based on the Stark effect and quantum confinement, which is applied in the field of optical switches based on the quantum confinement Stark effect, can solve the problems of insignificant filtering effect, small optical switch ratio, and reduced reliability, so as to achieve clear design principles, Reduced transmittance, high contrast effect
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[0026] A preparation method of an optical switch based on the quantum confinement Stark effect of the present invention specifically includes the following steps:
[0027] Step 1: Etch the interdigitated electrodes 1 on the quartz substrate, and the electrode spacing is in the order of several microns; specifically:
[0028] Dehydrate and bake the quartz substrate at a baking temperature of 150-200 °C, and coat a layer of negative su8 photoresist on the quartz substrate with a thickness of about 2 μm; The exposure characteristics of the glue are fixed, the soft baking temperature is 90-100°C, and the time is 10min; the substrate is blocked with a mask for exposure; post-exposure baking is performed to activate the chemical properties of the photoresist after exposure, and the temperature is 90°C, The time is 5min; for development, soak in NaOH solution with a concentration of 5%, and control the degree of development by controlling the soaking time; hard bake, bake at 150-200 ...
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