Surface treatment process and processing equipment for quartz crucible

Abstract

The invention relates to the technical field of quartz crucible production equipment, in particular to a surface treatment process and processing equipment for a quartz crucible, and the process comprises the following steps: carrying out sand blasting treatment on the outer surface of the quartz crucible by adopting a sand blasting machine; washing the quartz crucible subjected to sand blasting cutting with tap water, and reversely covering the washed quartz crucible on a frame to spray water drops on the surface; the washed quartz crucible is placed in a treating fluid to be soaked; taking out the quartz crucible soaked in the treating fluid, and leaching with deionized water; the washed crucible is baked, and the next packaging procedure can be carried out after baking is finished; comprising a soaking production structure, a spraying structure and a heating production part. According to the surface treatment process disclosed by the invention, the quartz crucible has the surface with uniform roughness, no sand blasting, no peak and no crack; and the processing equipment can perform assembly line type processing production, so that the production efficiency of an enterprise is greatly improved.

Description

technical field [0001] The invention relates to the technical field of quartz crucible production equipment, in particular to a surface treatment process and processing equipment for a quartz crucible. Background technique [0002] Quartz crucibles can be used below 1450 degrees, and are divided into transparent and opaque. The translucent quartz crucible made by arc method is an indispensable basic material for drawing large-diameter single crystal silicon and developing large-scale integrated circuits. Today, the world's semiconductor industry Developed countries have replaced small transparent quartz crucibles with this crucible, which has the advantages of high purity, strong temperature resistance, large size and high precision, good heat preservation, energy saving, and stable quality. [0003] According to Chinese Patent No. CN202022805869.7, the utility model discloses a quartz crucible for a single crystal furnace, a crucible assembly and a single crystal furnace. T...

AI Technical Summary

Problems solved by technology

A quartz crucible capable of rapid heat conduction according to the present invention is provided with a crucible tong ring groove, a ceramic inner crucible and a combined flip cover, which can facilitate the crucible tongs to pick up the crucible, and can increase the thermal conductivity of the crucible without affecting While the heat in the crucible is dissipated, it can prevent the heated object from splashing out, which brings better application prospects. However, this patent is inconvenient for a stable and limited connection, and needs to be improved.

[0006] But the surface treatment process and processing equipment of the existing quartz crucible still have some deficiencies in the process of use, for example: it is not convenient to carry out mixing and immersion reaction work, it is not easy to It is convenient to carry out the production of quartz crucible, and at the same time it is not convenient to carry out integrated processing and production, and it cannot achieve smooth operation to a greater extent. Therefore, a surface treatment process and processing equipment for quartz crucible are needed to solve the above-mentioned problems.

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