Iron-based amorphous alloy film and preparation method thereof, and electromagnetic shielding film and equipment applying iron-based amorphous alloy film

Abstract

The invention discloses an iron-based amorphous alloy film which comprises the following components in percentage by mass: more than or equal to 70wt% and less than or equal to 90wt% of Fe, more than or equal to 0 and less than or equal to 6wt% of Co, more than or equal to 1wt% and less than or equal to 4wt% of Si, more than or equal to 1wt% and less than or equal to 3wt% of B, more than 0.2 and less than or equal to 20wt% of Ni, more than or equal to 0 and less than 6wt% of Mo and more than or equal to 0 and less than 3wt% of C. The preparation method of the iron-based amorphous alloy film is a magnetron sputtering process, and the iron-based amorphous alloy film prepared by the process can be used for preparing a corresponding electromagnetic shielding film and equipment. The iron-based amorphous alloy film prepared by adopting the chemical component (mass percent) range and the magnetron sputtering process has the beneficial technical effect of excellent comprehensive magnetic performance, and the electromagnetic shielding film and equipment prepared from the iron-based amorphous alloy meet the application requirements of electronic shielding materials with high performance requirements.

Description

technical field [0001] The invention relates to the technical field of magnetic materials, in particular to an iron-based amorphous alloy thin film, a preparation method, an electromagnetic shielding film and equipment using the same. Background technique [0002] The amorphous soft magnetic materials currently on the market mainly include iron-based, cobalt-based, nickel-based and other amorphous alloys and nanocrystalline alloys. Iron-based amorphous has the characteristics of high magnetic permeability, low coercive force and low loss, which makes it an excellent soft magnetic material. With the development of science and technology, especially the rapid development of information technology, various industries will put forward higher and higher requirements for various electronic devices. Miniaturization, high sensitivity, fast response and high stability will be the future trend. Iron Based amorphous materials will be more and more widely used in many fields such as in...

AI Technical Summary

Problems solved by technology

However, traditional metal materials have high density, heavy weight, poor flexibility, corresponding narrow frequency bandwidth, and limited shielding effectiveness.

[0006] At present, due to the different functional requirements of electronic products and equipment, the electromagnetic waves generated by high-frequency oscillation contain various complex high and low frequency bands coexisting. It is difficult for traditional electromagnetic shielding materials to solve such complex electromagnetic compatibility problems. Therefore, it is necessary to develop a new type with better performance. Excellent electromagnetic shielding material

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