Sensor and method for detecting concentration of active metal oxide in air
A technology of active metals and oxides, used in instruments, measuring devices, scientific instruments, etc.
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Embodiment 1
[0035] A method for preparing a sensor for detecting the concentration of active metal oxides in the air in a fire environment, comprising the following steps:
[0036] SA1. Use HF solution to wet-etch the silicon-based sensitive film substrate 3, and etch a mounting groove for the replaceable water-absorbing material 9 on the upper end of the silicon-based sensitive film substrate 3.
[0037] SA2, the carbon monoxide thermal catalytic oxidizer 5, the first carbon dioxide sensitive film 8 and the second carbon dioxide sensitive film 10 are fixed on the silicon-based sensitive film through the first adhesive layer 4, the second adhesive layer 7 and the third adhesive layer 10 on substrate 3. The material of the first adhesive layer 4, the second adhesive layer 7 and the third adhesive layer 10 is novolac epoxy resin containing carborane, which can maintain good mechanical properties and adhesive properties at a temperature of 400 ° C. , chemical stability and electrical insula...
Embodiment 2
[0049] The material of the first carbon dioxide gas sensitive film 8 and the second carbon dioxide sensitive film 11 is CuO-BaTiO doped with 0.8%-1.2% Ag 3 , to measure the concentration of carbon dioxide before and after the reaction, and the measurement range can reach 0.01%-10%. The preparation process includes: preparation of CuO-BaTiO3 composite powder, Ag doping and sintering of gas-sensitive thin film. This manufacturing method can conveniently adjust the Ag, CuO and BaTiO in the final carbon dioxide sensitive thin film. 3 The content of preparation method is simple and easy, specifically comprises the following steps:
[0050] SB1, the BaTiO 3 with Cu(CO 2 CH 3 ) 2 ·H 2 O powder was added to deionized water at a mass ratio of (1.1-1.2):1 to obtain solution A. Add an appropriate amount of ethylene glycol to solution A as a shape-directing agent, ethylene glycol and BaTiO 3 The mass ratio of NaOH is (0.7-0.8): 1 and then NaOH solution is added dropwise, and the ma...
Embodiment 3
[0054] Carbon monoxide thermocatalytic oxidizer 5 uses Co containing 0.04%wt-0.05wt% Au 3 o 4 . Its preparation process is:
[0055] SC1, Co(NO 3 ) 2 and Na 2 CO 3 Co was produced using the co-precipitation method at room temperature 3 o 4 crystal, and then calcined at 400°C for 5h to obtain Co 3 o 4 piece.
[0056] SC2, the Co 3 o 4 Block cut into 10mm x 10mm x 0.5mm Co 3 o 4 Flakes.
[0057] SC3, using a target containing 0.05wt% gold for sputtering, and adsorbing gold atoms on Co 3 o 4 The surface of the flake was calcined at 400° C. for 5 h after sputtering to obtain a carbon monoxide thermal catalytic oxidizer 5 .
[0058] The carbon monoxide thermal catalytic oxidizer 5 is used to catalyze the oxidation of carbon monoxide in the air to carbon dioxide in advance, so as to prevent the Ag in the gas-sensitive film from catalytically oxidizing carbon monoxide to carbon dioxide from affecting the test results. co 3 o 4 It is a highly efficient thermal cata...
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