Laser direct writing data processing method and system

Abstract

A laser direct writing data processing system disclosed by the present invention comprises a host computer, a slave computer and a data processing module, and the data processing module is composed of a digital optical processing chip, a data transmission module, a control module, an operation module, a storage control module and a storage module. A digital optical processing chip set comprises the digital light processing chip, a program storage chip and an image transmission chip, the data transmission module is used for receiving the signals sent by the host computer and transmitting the signals to the operation module, and the storage control module is used for controlling the signals output by the operation module to be input into the storage module. According to the present invention, the laser direct writing data is blocked, then the related data arrays and a plurality of data positions are correspondingly put in, and the header data blocks are stored, so that the texture data is stored in a compressed form to reduce the storage and bandwidth burdens, the data processing is quicker, and the accurate storage can be realized, and accordingly the laser direct writing is smoother.

Description

technical field [0001] The invention belongs to the technical field of laser direct writing, and in particular relates to a data processing method and system for laser direct writing. Background technique [0002] Laser direct writing lithography technology does not require intermediate mask exposure, and directly draws the required pattern on the substrate. Compared with traditional mask exposure lithography, which needs to re-make the mask every time the pattern is changed, it greatly facilitates researchers. , reducing the production cost. [0003] However, it also increases the complexity of the system while being convenient for users. A typical laser direct writing system includes subsystems such as optical imaging, motion control, exposure metering control, overlay alignment, and data processing. On the one hand, there are differences in the hardware selection for different client models, so the upper software needs to be adapted to different hardware types, which bri...

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Problems solved by technology

[0003] However, it also increases the complexity of its own system while being convenient for users. A typical laser direct writing system includes subsystems such as optical imaging, motion control, exposure metering control, overlay alignment, and data processing.

On the one hand, there are differences in the hardware selection for different client models, so the upper software needs to be adapted to different hardware types, which brings certain complexity to software writing and later maintenance;

[0004] The existing laser direct writing system and method require a relatively large network load, high consumption, and complicated operations, and cannot effectively provide data processing. Therefore, we propose a laser direct writing data processing method and system

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