Composite antireflection film and manufacturing method thereof

Abstract

The invention discloses a composite antireflection film and a manufacturing method thereof. The manufacturing method comprises the steps of placing a substrate in magnetron sputtering equipment, controlling the flow of argon, controlling the flow ratio of argon to oxygen in ICP, and alternately forming a plurality of low-density first film layers and a plurality of low-density second film layers on the substrate, wherein the first film layers have a first refractive index, the second film layers have a second refractive index, the first refractive index is different from the second refractive index, and the film layer located on the outermost layer is the first film layer; and reducing the flow of the argon, keeping the flow ratio of the argon to the oxygen in the ICP, and forming a third film layer with high density and the first refractive index on the outermost first film layer. According to the composite antireflection film, the third film layer effectively'resists water vapor ', the possibility of reflectivity change is lowered, and therefore the possibility of influencing the optical effect is lowered.

Description

technical field [0001] The invention relates to the technical field of anti-reflection film production, in particular to a composite anti-reflection film and a production method thereof. Background technique [0002] Plastic covers, because they are safer than glass, are also commonly used in automobiles, such as covers for central control screens or instrument screens. In the automotive industry, it is often necessary to coat the surface of the cover with an anti-reflection film to minimize the reflectivity of the surface. This kind of anti-reflection film is commonly used in the industry by magnetron sputtering vacuum plating. [0003] However, due to the high energy of sputtering, the plated film is relatively dense, and the stress is large and greater than that of the plastic substrate, resulting in serious deformation of the plastic substrate. To solve this problem, we increase the amount of argon gas in the coating process, which means that the ejected target atoms a...

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Problems solved by technology

[0005] The invention discloses a composite anti-reflection film and its manufacturing method, which is used to solve the problem in the prior art that the density of the anti-reflection film decreases and it is easily "eroded" by water vapor

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