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Rolling preparation method for large-specification molybdenum-niobium alloy target material

A molybdenum-niobium alloy and large-scale technology, which is applied in the field of rolling preparation of large-scale molybdenum-niobium alloy targets, can solve the problems of producing large-scale target blanks and difficult rolling processes of molybdenum-niobium alloy targets, and achieve the promotion of grain Obvious refinement, fine grains, and the effect of avoiding the formation of rolling cracks

Pending Publication Date: 2021-11-12
ACHEMETAL TUNGSTEN & MOLYBDENUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a rolling preparation method of a large-scale molybdenum-niobium alloy target, which is used to solve the problem that the molybdenum-niobium alloy target is difficult to produce large-scale target blanks by rolling process

Method used

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  • Rolling preparation method for large-specification molybdenum-niobium alloy target material
  • Rolling preparation method for large-specification molybdenum-niobium alloy target material
  • Rolling preparation method for large-specification molybdenum-niobium alloy target material

Examples

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Effect test

Embodiment 1

[0023] A rolling preparation method for a large-scale molybdenum-niobium alloy target, specifically: the raw materials Mo and Nb are mixed by a vacuum mixer for 18 hours according to the mass ratio of 9:1, mixed evenly, put into a rubber sleeve mold and sealed, and then cooled Hold the pressure at 160MPa in the isostatic press for 3 minutes, and press it into a compact; make a jacket according to the specifications of the compact, put the compact into the jacket, vacuumize at room temperature to 0.001Pa, and slowly raise the temperature with a temperature gradient of 50°C. Stage heat preservation for 0.5 hours, heat preservation for 4 hours when the temperature rises to 500°C, vacuum degree is 0.0008Pa, sheath sealing welding; after welding, perform hot isostatic pressing, hot isostatic pressing temperature is 1250°C, heat preservation for 3 hours; after hot isostatic pressing Direct rolling with sheathing, the billet opening temperature is 1400°C, the deformation of each pass ...

Embodiment 2

[0025] A rolling preparation method for a large-scale molybdenum-niobium alloy target, specifically: mix the raw materials Mo and Nb through a vacuum mixer for 20 hours according to the mass ratio of 9:1, mix them evenly, put them into a rubber sleeve mold, seal them, and place them in the cold Hold the pressure at 180MPa in the isostatic press for 6 minutes, and press it into a compact; make a jacket according to the specifications of the compact, put the compact into the jacket, vacuumize at room temperature to 0.001Pa, and slowly raise the temperature with a temperature gradient of 50°C. Stage heat preservation for 0.5h, heat preservation for 6h when the temperature rises to 550°C, vacuum degree is 0.0005Pa, sheath seal welding; hot isostatic pressing after welding, hot isostatic pressing temperature is 1320°C, heat preservation for 3h; after hot isostatic pressing Direct rolling with sheathing, billet opening temperature 1425°C, deformation amount 25%, cooling rolling after...

Embodiment 3

[0027] A rolling preparation method for a large-scale molybdenum-niobium alloy target material, specifically: mix the raw materials Mo and Nb through a vacuum mixer for 24 hours according to the mass ratio of 9:1; Keep the pressure at 200MPa in the isostatic press for 10min, and press it into a compact; make a sheath according to the specifications of the compact, put the compact into the sheath, vacuumize at room temperature to 0.001Pa, and slowly heat up, with a temperature gradient of 50°C, each gradient stage Heat preservation for 0.5h, heat preservation for 8h when the temperature rises to 600°C, the vacuum degree is 0.0004Pa, and the sheath is sealed and welded; after the welding is completed, hot isostatic pressing is carried out at a temperature of 1400°C, and heat preservation is for 3h; Rolling with sheathing, billet opening temperature 1450°C, deformation 30%, cooling rolling after billet opening, final rolling temperature 1250°C, pass deformation 15-30%, rolling sta...

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Abstract

The invention relates to a rolling preparation method for a large-specification molybdenum-niobium alloy target material. The method specifically comprises the following steps that raw material powder of the target material alloy is uniformly mixed, cold isostatic pressing, hot isostatic pressing, rolling with a sheath, and then leveling and annealing are performed, the sheath is removed, and the mixture is machined to a specified size, wherein a cogging temperature of rolling with the sheath is 1400 DEG C-1450 DEG C, and the pass deformation quantity is 20%-30%, and cooling and rolling are performed until a final rolling temperature is 1250 DEG C. According to the method, a molybdenum-niobium target blank can be rolled and produced, according to the equipment size, the large-specification size can be achieved, the long-strip target material with the size of 2000 mm or above can be rolled, and compared with a sintered target material, the rolled target material is high in density and can reach the theoretical density.

Description

technical field [0001] The invention belongs to the technical field of target material production, and in particular relates to a rolling preparation method of a large-scale molybdenum-niobium alloy target material. Background technique [0002] Molybdenum and molybdenum alloy targets are mostly used to make thin film transistors, liquid crystal display panels, and solar cells. At present, most high-end targets are monopolized by large foreign companies, and domestic target companies are concentrated in the field of low-end products. Certification, cutting into downstream enterprises, and molybdenum alloy targets such as molybdenum niobium, molybdenum titanium, molybdenum tantalum, etc., due to the addition of active alloy elements, the densification of the alloy is difficult, and the oxygen content is difficult to control. Poor and difficult to roll, currently it is mainly produced by wire cutting machine after high temperature sintering, often with low sintering density, g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/04B22F3/15B22F3/18B22F3/24B22F5/00
CPCC23C14/3414B22F5/00B22F3/04B22F3/15B22F3/18B22F3/24B22F2003/248
Inventor 杨景红耿宏安张军海
Owner ACHEMETAL TUNGSTEN & MOLYBDENUM
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