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Boron trichloride purification device

A boron trichloride, liquefier technology, applied in boron halide compounds, chemical recovery, boron halide and other directions, can solve the problems of low purity of boron trichloride, complicated operation procedures, low purification efficiency, etc., to achieve easy operation, The effect of ensuring continuity and ensuring purity

Pending Publication Date: 2021-11-02
CHONGQING TONGHUI GAS
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Problems solved by technology

[0003] The object of the present invention is to provide a kind of boron trichloride purifying device, to solve existing problem: the boron trichloride purity after the existing purifying device purifying is lower, and production cost is higher, and operating procedure is comparatively complicated, Purification efficiency is low

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  • Boron trichloride purification device

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0028] see figure 1 As shown, the present invention is a boron trichloride purification device, including a raw material bus bar 1, a boron trichloride adsorption system 2, a filter 3, a rectification tower 4, a liquefier 5, a finished product storage mechanism 6, and a recovery storage mechanism 7. Recycling filling mechanism 8, finished product filling mechanism 9, tail gas removal system 10, hot nitrogen gas inlet 11 and non-condensable steam discharge mechanism...

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Abstract

The invention discloses a boron trichloride purification device, and relates to the technical field of boron trichloride. The device comprises a raw material flow convergence channel, a boron trichloride adsorption system, a filter, a rectifying tower, a liquefier, a finished product storage mechanism, a recovery storage mechanism, a recovery filling mechanism, a finished product filling mechanism, a tail gas removal system, a hot nitrogen access port and a non-condensable steam discharge mechanism. Through cooperation of all accessories, boron trichloride can be well purified, high-purity boron trichloride is obtained, unqualified boron trichloride can be automatically recycled, the production cost is reduced, one-time forming is achieved in the purification process, continuity of the purification technology is guaranteed, boron trichloride is prevented from being affected by external impurities, the purity of boron trichloride is guaranteed, and the method is easy to operate, high in efficiency and suitable for large-scale popularization.

Description

technical field [0001] The invention belongs to the technical field of boron trichloride, in particular to a boron trichloride purification device. Background technique [0002] Boron trichloride is a dangerous chemical. It is mainly used as a doping source for semiconductor silicon or as a catalyst for organic synthesis. It can also be used for the preparation of high-purity boron or organic boron. When preparing boron trichloride, it needs The boron trichloride is purified by using a purification device, but the boron trichloride purified by the existing purification device has low purity, high production cost, complicated operation process and low purification efficiency. Contents of the invention [0003] The object of the present invention is to provide a kind of boron trichloride purifying device, to solve existing problem: the boron trichloride purity after the existing purifying device purifying is lower, and production cost is higher, and operating procedure is co...

Claims

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Application Information

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IPC IPC(8): C01B35/06
CPCC01B35/061Y02P20/584
Inventor 黄加斗宗立冬刘川蔡炎南
Owner CHONGQING TONGHUI GAS
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