Method and system for measuring warping degree of liquid crystal substrate glass

A measurement method and liquid crystal substrate technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems that cannot completely eliminate the mechanical error of the 00-level marble platform surface of the liquid crystal substrate measuring device, and the unfavorable warping degree requirements, etc., to improve The effect of measurement efficiency and measurement accuracy

Active Publication Date: 2021-07-23
甘肃旭盛显示科技有限公司 +2
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Problems solved by technology

[0003]The existing liquid crystal substrate glass warpage measurement method cannot completely eliminate the mechanical error of the 00-grade marble platform surface of the liquid crystal substrate measurement device, which is not conducive to the increasingly strict warpage degree requirements

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  • Method and system for measuring warping degree of liquid crystal substrate glass
  • Method and system for measuring warping degree of liquid crystal substrate glass
  • Method and system for measuring warping degree of liquid crystal substrate glass

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Embodiment Construction

[0052] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0053] figure 1 It is a schematic diagram of the existing measurement system for measuring mechanical errors. Since the warpage value is the distance between the two points farthest from the tested sample plane in the height direction, if the tested sample is an absolute plane, the warped degree is 0. Such as figure 1 As shown, due to the mechanical error of the marble bearing platform, the surface is not an ideal horizontal two-dimensional plane. When measuring the warpage value of the glass sample of the liquid crystal substrate, the sample is placed on the marble bearing platform, and the sample is attached to the marble bearing platform. At this time, the...

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Abstract

The invention provides a method and a system for measuring a warping degree of liquid crystal substrate glass, and belongs to the field of liquid crystal substrate glass. The warping degree measuring method comprises the following steps: delimiting a working area on a bearing platform, and delimiting a measuring area in the working area; obtaining three-dimensional coordinates of a working area surface, wherein the working area surface is a zero surface I; based on the three-dimensional coordinates of the zero surface I, determining the three-dimensional coordinates of a track surface of a measuring lens moving in the measuring area surface, wherein the track surface is a zero surface III, the zero surface III is parallel to the zero plane I in a three-dimensional space, and the zero surface III is in a range of depth of field H mm of the measuring lens, and H is greater than 0 mm; in a sample wafer measurement process, planning the measuring lens to move according to the three-dimensional coordinate points of the zero surface III, and collecting the three-dimensional coordinates of the sampling points on a sample wafer in real time; and calculating the vertical distance from each sampling point to the zero surface III, and calculating the warping degree value of the sample wafer according to the vertical distance. According to the method, the mechanical error of the zero surface I can be eliminated, and a measurement result is more accurate.

Description

technical field [0001] The invention relates to the field of liquid crystal substrate glass, in particular to a method for measuring the warpage of liquid crystal substrate glass and a system for measuring the warpage of liquid crystal substrate glass. Background technique [0002] Warpage is an important indicator for evaluating substrate glass. The quality of warpage directly reflects whether the production process is stable and reliable, and it also has a great impact on the customer's process technology. [0003] The existing liquid crystal substrate glass warpage measurement method cannot completely eliminate the mechanical error of the 00-grade marble platform surface of the liquid crystal substrate measurement device, which is not conducive to the increasingly stringent requirements for warpage. And to implement a warpage measurement, it is necessary to obtain the warpage value through cloud computing for each measurement point after the entire board sample is measure...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/16
CPCG01B11/002G01B11/16
Inventor 李青李赫然张北斗李俊生杨道辉李斌韩春林
Owner 甘肃旭盛显示科技有限公司
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