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Electro-optical crystal film for electro-optical modulator, preparation method and electronic component

An electro-optic modulator and electro-optic crystal technology, which is applied in the direction of optical components, optical waveguides, light guides, etc., can solve problems that affect the performance of electronic devices, damage to film layers, etc., and prevent optical signals from leaking to the substrate layer and have a small thickness. Effect

Active Publication Date: 2021-06-29
JINAN JINGZHENG ELECTRONICS
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Problems solved by technology

[0005] In order to solve the technical problem in the prior art that etching the optical waveguide on the thin film layer will cause certain damage to the thin film layer, thereby affecting the performance of the applied electronic device, this application provides an electro-optical modulator Electro-optic crystal film, preparation method and electronic component

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  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component
  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component
  • Electro-optical crystal film for electro-optical modulator, preparation method and electronic component

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Embodiment Construction

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0035] see figure 1 , the application provides a method for preparing an electro-optic crystal film for an electro-optic modulator, comprising the following steps:

[0036] Step 100 , preparing an electrode layer 200 on the substrate layer 110 .

[0037] The substrate layer 110 may be a single-layer substrate or a composite substrate, which is not limited in this application. The present application does not limit the material of the substrate layer 110, for example: the material of the subst...

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Abstract

The invention provides an electro-optical crystal film for an electro-optical modulator, a preparation method and an electronic component. The preparation method comprises the steps of preparing a target groove array on a substrate layer laminated with an electrode layer; performing ion implantation on the electro-optical crystal substrate, and cutting the electro-optical crystal substrate into electro-optical crystal slices; transferring the electro-optical crystal slices into the corresponding grooves in the target groove array, and bonding the electro-optical crystal slices with isolation layers in the corresponding grooves in the target groove array to obtain a bonding body; and carrying out heat treatment on the bonding body to obtain the electro-optical crystal film. The electro-optical crystal film layer reserved in each groove forms an optical waveguide structure, and optical signals of the optical waveguide are controlled through the grooves formed by the electrodes, so that the electro-optical modulation function is realized. Meanwhile, the isolation layer is only formed on the etched area of the substrate layer instead of being clamped between the substrate layer and the electrode layer, so that the optical signals can be prevented from leaking to the substrate layer, and the thickness of the whole structure can be ensured to be small.

Description

technical field [0001] The application belongs to the technical field of semiconductors, and in particular relates to an electro-optic crystal thin film used for an electro-optic modulator, a preparation method and electronic components. Background technique [0002] Electro-optic crystal materials such as lithium niobate or lithium tantalate are widely used in nonlinear optics, ferroelectricity, and piezoelectricity due to their advantages such as high Curie temperature, strong spontaneous polarization, high electromechanical coupling coefficient, and excellent electro-optic effect. , electro-optic and other fields, especially in the fields of thin-film bulk acoustic wave devices, filters, electro-optic modulators, etc., have received more and more attention and applications. If electro-optic modulators are prepared using electro-optic crystal materials such as lithium niobate or lithium tantalate, it is necessary to further prepare the lithium niobate film into the require...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/03G02F1/035G02B6/122G02B6/136G02B6/12
CPCG02F1/03G02F1/0305G02F1/0316G02F1/035G02B6/122G02B6/136G02B2006/12142G02B2006/12042G02B2006/12045
Inventor 刘桂银张秀全王金翠连坤
Owner JINAN JINGZHENG ELECTRONICS
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