High-sensitivity miniature self-powered acoustoelectric converter based on two-dimensional film

Abstract

The invention provides a high-sensitivity miniature self-powered acoustoelectric converter based on a two-dimensional film. The high-sensitivity miniature self-powered acoustoelectric converter comprises a substrate, an electrode layer formed by a plurality of electrodes and the two-dimensional thin film with a piezoelectric effect or a piezoelectric-like effect; and a plurality of cavities which are independent from one another and are different in size are formed in the substrate through selective etching of the substrate, and each electrode in the electrode layer is located in the range, where no cavity is formed, of the substrate. Through the cavity with a certain volume under the two-dimensional film, sound waves can be fully reflected in the cavity, so that the sound waves can act on the two sides of the two-dimensional film together, the amplitude is increased, meanwhile, a sound signal is converted into an electric signal through the piezoelectric effect or similar piezoelectric effect existing in part of the two-dimensional film, and the sound-electricity conversion function is achieved. The high-sensitivity miniature self-powered acoustoelectric converter has the advantages of prominent sensitivity and self-power supply, and has prominent application prospects in the field of wearable electronics, especially in the aspect of artificial cochlear application.

Description

technical field [0001] The invention belongs to the technical field of acoustic-electric transducers, in particular to a high-sensitivity miniature self-powered acoustic-electric transducer based on a two-dimensional thin film. Background technique [0002] With the development and progress of electronic product technology, acoustic-electric converters are widely used in various electronic devices. [0003] As a kind of energy converter, capacitive acoustic-electric conversion is a widely used type at present. The capacitive acoustic-electric transducer consists of a diaphragm, a housing, a rear plate and an insulator. The diaphragm is generally a conductor. It is stretched directly on the top of the shell by means of a film ring or directly, and is kept parallel to the rear plate with a small distance to form a parallel plate capacitor. Let the capacitance of the parallel plate capacitor be C 0 , under the action of sound waves, the diaphragm vibrates to produce a capacit...

AI Technical Summary

Problems solved by technology

However, the traditional capacitive acoustic-electric conversion device faces the problem of being difficult to miniaturize due to the narrow space between the capacitive plates.

Although foreign scholars have proposed acoustic-electric conversion devices based on piezoelectric film polyvinylidene fluoride (PVDF), the thickness of PVDF film is still 40 microns, and the acoustic sensitivity needs to be improved.

For polymer materials, it is difficult to apply them on flexible substrates due to their characteristics.

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