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Resonance type gas sensor

A gas sensor and resonance technology, applied in the field of resonant gas sensors, can solve the problems of low sensor sensitivity and no consideration of acoustic signal enhancement technology, etc.

Pending Publication Date: 2021-05-18
CHINA ELECTRONICS TECH GRP NO 26 RES INST +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the acoustic signal released after the measured gas absorbs light in a specific spectrum is relatively weak, none of the above sensors consider the enhancement technology of the acoustic signal, so the sensitivity of the sensor is low

Method used

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0020] The resonant gas sensor mentioned in this embodiment is a miniaturized resonant photoacoustic gas sensor. Compared with the prior art, the miniaturized resonant photoacoustic gas sensor of the present invention has higher sensitivity than the traditional photoacoustic gas sensor. Higher, higher measurement accuracy, higher resolution.

[0021] This embodiment provides a resonant gas sensor, such as figure 1 and Figure 5 As shown, its structure includ...

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Abstract

The invention relates to the technical field of gas sensors, in particular to a resonance type gas sensor which comprises an integrated light source, a photoacoustic cell, an acoustic detector and a circuit layer substrate. The integrated light source and the acoustic detector are arranged on the circuit layer substrate, an optical filter is arranged on the integrated light source, and the photoacoustic cell is a semi-closed cavity. The photoacoustic cell and the circuit layer substrate are matched in shape and structure and jointly form a closed cavity with a hole. The integrated light source, the photoacoustic cell and the acoustic detector which are arranged on the circuit layer substrate are wrapped in a cavity of the photoacoustic cell. The photoacoustic cell comprises a supporting framework and a plurality of resonance surfaces, the supporting framework and the resonance surfaces are adhered and combined to form a semi-closed cavity, at least one of the resonance surfaces is thin, one or more small air holes are formed in any one or more of the resonance surfaces, and a waterproof breathable film or a waterproof sound transmission film is arranged on the outer side of each air hole. The resonance type gas sensor provided by the invention is higher in sensitivity, higher in measurement precision and higher in resolution.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a resonant gas sensor. Background technique [0002] Gas sensors are widely used in smart cities, medical health, industrial control and other fields. With the rapid development of emerging industries such as the Internet of Things and people's increasing attention to air environmental quality, the application demand for gas sensors is growing rapidly. Gas sensors mainly include semiconductor type, catalytic combustion type, electrochemical type, non-dispersive infrared (NDIR) type and other types. Among them, the biggest problem in the use of gas sensors such as semiconductor type, catalytic combustion type, and electrochemical type is poor selectivity to gases, and there is cross-interference between different gases. Infrared gas sensors are based on the selective absorption of infrared light of specific wavelengths by gas molecules. Principle works. The NDIR infrared gas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17
CPCG01N21/1702G01N2021/1704
Inventor 袁宇鹏张祖伟杨靖王登攀何香君
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST
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