Fixture for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its application method

Abstract

A jig for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its use method. The fixture includes a base, a water tank, a water tank drainage hole, a base limit ring, a tension ring, a buffer pad, and a tension bolt; Prefabricated stress between the surface and the diamond film; the base limit ring is placed outside the base, the water tank is placed on the top of the base limit ring, and the water tank is provided for the gap between the base and the base limit ring through the water drainage holes evenly distributed at the bottom of the tank ; The buffer pad is placed on the bottom surface of the base; the tension ring covers the outer edge of the buffer pad. After the leveling treatment is completed, the entire fixture is directly subjected to rapid heating treatment until the adhesive fails, and the leveling treatment process is completed. The invention improves the complete film rate and processing efficiency of the diamond film, solves the problem of powder sticking, and reduces environmental pollution. It can also be used for flattening the diamond film with cracks, inhibiting the expansion of cracks and increasing the use area of ​​the diamond film.

Description

technical field [0001] The invention belongs to the field of diamond film processing and preparation, and in particular relates to a jig and a method capable of ensuring a complete film rate during the flattening process of diamond film grinding and polishing, and can efficiently complete the flattening process of the diamond film. [0002] technical background [0003] Diamond film has important application value due to its excellent performance. For the above-mentioned diamond film, grinding, polishing and other smoothing processes are necessary before the application of planarization treatment, and the high-efficiency planarization process is also an important prerequisite for the wide application of diamond film. [0004] The diamond film planarization process usually adopts two methods: single-side grinding and double-side grinding. Double-side grinding is to place the material in the grinder, and both sides are free surfaces, which can contact the grinding medium to ach...

AI Technical Summary

Problems solved by technology

[0007] The invention provides a fixture for suppressing the initiation and expansion of diamond film cracks, which solves the problem that the diamond film cannot inhibit the initiation and expansion of cracks in the existing planarization technology

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