An out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity

An accelerometer and cross-axis technology, applied in the field of MEMS inertial devices, can solve the problems of instrument temperature characteristics, poor suppression ability, etc., achieve good consistency and synergy, low mechanical noise, and increase the detection electrode area.

Active Publication Date: 2022-07-29
BEIJING INST OF AEROSPACE CONTROL DEVICES
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  • Application Information

AI Technical Summary

Problems solved by technology

The traditional torsional pendulum accelerometer adopts a single torsion mass structure, which has poor ability to suppress common mode interference and errors caused by changes in operating temperature. When the operating temperature changes, the temperature characteristics of the instrument will be affected due to changes in the thermal stress of the material. make an impact

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  • An out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity
  • An out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity
  • An out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity

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Embodiment Construction

[0032] The invention is an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity, comprising: a sensitive structure, a silicon substrate and a silicon cover; the silicon substrate is located below the sensitive structure and is bonded to the sensitive structure through an anchor point , and provides fixation and support for the sensitive structure; the sensitive structure is located between the silicon substrate and the silicon cover plate as the core structure for realizing acceleration detection; the silicon cover plate is located above the sensitive structure to protect the sensitive structure.

[0033] The sensitive structure includes four sets of sensitive mass units and an unbalanced mass block; the arrangement of the sensitive structure has a high degree of symmetry, and the axis perpendicular to the plane of the accelerometer chip is the Z axis, and the X axis and the Y axis are both parallel. On the plane of the accelerometer chip, ...

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Abstract

The invention discloses an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity, and relates to the field of MEMS inertial devices. The accelerometer includes a structural layer, a substrate layer and a silicon cover plate. The sensitive structure of the accelerometer includes four sets of orthogonally distributed sensitive mass units and an unbalanced mass. Each group of sensitive mass elements is connected to the central mass through two connecting beams. Each proof mass center includes two anchor points, each anchor point is connected to the proof mass by two elastic torsion beams. The Z-axis MEMS accelerometer with low cross-axis sensitivity of the present invention has the advantages of having a sensitive structure with large mass blocks, reducing common mode interference through multiple differential mass blocks, and realizing low cross-axis sensitivity through orthogonally distributed sensitive mass units .

Description

technical field [0001] The invention belongs to the field of MEMS inertial devices, in particular to an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity. Background technique [0002] MEMS accelerometer is an inertial sensor manufactured based on MEMS process technology, which is used to measure inertial parameters such as carrier tilt angle, inertial force, shock and vibration. MEMS accelerometers have the advantages of small size, low cost, high reliability, suitable for mass production, etc., and are widely used in aerospace, defense and military, consumer electronics, smart medical, earthquake monitoring and other fields. [0003] With the boom in research on vehicles such as unmanned aerial vehicles, unmanned vehicles, and unmanned ships in recent years, various micro-navigation and micro-inertial systems have an urgent need for three-axis accelerometers that can provide all-round acceleration information. In this process, high...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125G01P15/08G01P15/18
CPCG01P15/125G01P15/08G01P15/0802G01P15/18G01P2015/0865
Inventor 刘国文马智康李兆涵刘宇赵亭杰刘福民杨静
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
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