InGaAs multi-linear array photosensitive chip and application thereof

Abstract

The invention relates to an InGaAs multi-linear array photosensitive chip and an application thereof, and belongs to the technical field of infrared detectors. The multi-linear array photosensitive chip is an InGaAs chip with band-pass films having different sizes and components and deposited on different linear array photosensitive elements, can realize simultaneous absorption of spectra of different wave bands, is also beneficial to simplifying the structure of a spectrometer and improving the stability and long-term reliability of the instrument, and has important significance for the technical development of a micro spectrometer. According to the detector assembly based on the InGaAs multi-linear array photosensitive chip, spectral information of different wave bands can be collected at the same time in a linear scanning mode, the multi-spectral imaging capacity and the recognition efficiency of the detector assembly are greatly improved, the structure is simple, and good stabilityand high reliability are achieved; the InGaAs multi-linear array photosensitive chip can be widely applied to target identification, biomedicine, scientific research, satellite remote sensing and thelike.

Description

technical field [0001] The invention relates to an InGaAs multi-line photosensitive chip capable of simultaneously absorbing different band spectra and its application in a multi-spectral imaging detector, belonging to the technical field of infrared detectors. Background technique [0002] Miniature spectrometers have a wide range of application requirements in agriculture, food, industry and other fields. They are ideal instruments for on-site quality inspection and on-line inspection. . The InGaAs detector has the advantages of uncooled room temperature operation, high detection rate and good uniformity in the 0.9 μm ~ 1.7 μm band, and has become an ideal choice for miniature near-infrared spectrometer chips. Micro-spectrometers based on short-wave infrared InGaAs detectors usually use the following two technical solutions: [0003] (1) Using InGaAs unit detectors, as well as scanning and stepping devices, gratings, mirrors, etc., to achieve spectral measurement. Its a...

AI Technical Summary

Problems solved by technology

Its advantage is low cost, and its disadvantage is that there are moving parts inside the instrument, which affects the long-term stability and reliability of the instrument

[0004] (2) Using InGaAs linear focal plane detector components, gratings, mirrors, etc., the instrument is an all-solid-state spectroscopic system, its stability and reliability have been greatly improved, but the integration level of the instrument needs to be further improved

[0005] To sum up, the current InGaAs linear detectors have problems such as complex structure, poor reliability and stability, and low integration, which are not conducive to wider applications.

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