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A suspension stylus displacement sensor and detection method based on differential polarization interference

A technology of displacement sensors and interferometers, which is applied in the direction of instruments, measuring devices, optical devices, etc., can solve the problems of unable to meet the needs of large-scale measurement and small measurement range, so as to improve stability and anti-interference ability, and has a wide range of applications , Improve the effect of measurement accuracy

Active Publication Date: 2021-10-15
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
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Problems solved by technology

However, the electromagnetic force control structure controls the axial force, and the coil structure limits the displacement range of the stylus shaft, so the measurement range is small and cannot meet the needs of large-scale measurement

Method used

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  • A suspension stylus displacement sensor and detection method based on differential polarization interference
  • A suspension stylus displacement sensor and detection method based on differential polarization interference
  • A suspension stylus displacement sensor and detection method based on differential polarization interference

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Embodiment Construction

[0033]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0034] see figure 1 and figure 2 , the suspension stylus displacement sensor based on differential polarization interference provided by the present invention, the displacement sensor includes a differential polarization interferometer 1, a voice coil motor 2 and a suspension stylus mechanism 3, the differential polarization interferometer 1, the voice The coil motor 2 and the suspension stylu...

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Abstract

The invention belongs to the technical field of precision displacement measurement, and discloses a displacement sensor and detection method of a suspension stylus based on differential polarization interference. The needle mechanism and the suspension stylus mechanism are connected to the voice coil motor; the voice coil motor includes a movably connected voice coil motor stator and a voice coil motor mover, and the voice coil motor mover is used to drive the suspension stylus mechanism to move vertically; The suspension stylus mechanism includes a suspension bearing connected to the voice coil motor mover and a stylus shaft movably connected to the suspension bearing; the differential polarization interferometer is used to measure the displacement of the stylus shaft relative to the suspension bearing to obtain the primary displacement; through Measure the displacement of the voice coil motor mover relative to the voice coil motor stator to obtain the secondary displacement, and combine the primary displacement and secondary displacement to obtain the measurement result of the surface to be measured. The invention improves the stability and reliability, and expands the measurement range.

Description

technical field [0001] The invention belongs to the technical field related to precision displacement measurement, and more specifically relates to a displacement sensor and detection method of a suspended stylus based on differential polarization interference. Background technique [0002] With the development of manufacturing technology issues in the direction of precision and ultra-precision, the requirements for the accuracy of the surface topography of parts are also constantly improving. Surface topography measurement parameters include profile, waviness, roughness, etc. The research on measurement theory and The research and development of measuring instruments has become the focus of people's research. [0003] Surface topography measurement methods are mainly divided into contact type and non-contact type. The traditional contact type measurement is mainly a lever type measurement structure. Such a structure will inevitably produce nonlinear errors. At the same ti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B11/24G01B11/30
CPCG01B11/02G01B11/2441G01B11/30
Inventor 吴运权常素萍卢文龙刘晓军赵言情王浩
Owner HUAZHONG UNIV OF SCI & TECH
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