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Suspension contact pin displacement sensor based on differential polarization interference and detection method

A technology of displacement sensors and interferometers, which is applied in the direction of instruments, measuring devices, and optical devices, etc., can solve the problems of unable to meet the needs of large-scale measurement and small measurement range, so as to improve stability and anti-interference ability, and has a wide range of applications , Improve the effect of stability and reliability

Active Publication Date: 2021-03-19
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the electromagnetic force control structure controls the axial force, and the coil structure limits the displacement range of the stylus shaft, so the measurement range is small and cannot meet the needs of large-scale measurement

Method used

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  • Suspension contact pin displacement sensor based on differential polarization interference and detection method
  • Suspension contact pin displacement sensor based on differential polarization interference and detection method
  • Suspension contact pin displacement sensor based on differential polarization interference and detection method

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Embodiment Construction

[0033]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0034] see figure 1 and figure 2 , the suspension stylus displacement sensor based on differential polarization interference provided by the present invention, the displacement sensor includes a differential polarization interferometer 1, a voice coil motor 2 and a suspension stylus mechanism 3, the differential polarization interferometer 1, the voice The coil motor 2 and the suspension stylu...

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Abstract

The invention belongs to the related technical field of precision displacement measurement, and discloses a suspension contact pin displacement sensor based on differential polarization interference and a detection method, the displacement sensor comprises a differential polarization interference device, a voice coil motor and a suspension contact pin mechanism which are arranged from top to bottom, and the suspension contact pin mechanism is connected to the voice coil motor; the voice coil motor comprises a voice coil motor stator and a voice coil motor rotor which are movably connected, andthe voice coil motor rotor is used for driving the suspension contact pin mechanism to move vertically; the suspension contact pin mechanism comprises a suspension bearing connected to the voice coilmotor rotor and a contact pin shaft movably connected to the suspension bearing; the differential polarization interference device is used for measuring the displacement of the contact pin shaft relative to the suspension bearing to obtain a first-stage displacement amount; the secondary displacement is obtained by measuring the displacement of the voice coil motor rotor relative to the voice coil motor stator, and the measurement result of the measured surface can be obtained by calculating and combining the primary displacement and the secondary displacement. According to the invention, thestability and the reliability are improved, and the measurement range is expanded.

Description

technical field [0001] The invention belongs to the technical field related to precision displacement measurement, and more specifically relates to a displacement sensor and detection method of a suspended stylus based on differential polarization interference. Background technique [0002] With the development of manufacturing technology issues in the direction of precision and ultra-precision, the requirements for the accuracy of the surface topography of parts are also constantly improving. Surface topography measurement parameters include profile, waviness, roughness, etc. The research on measurement theory and The research and development of measuring instruments has become the focus of people's research. [0003] Surface topography measurement methods are mainly divided into contact type and non-contact type. The traditional contact type measurement is mainly a lever type measurement structure. Such a structure will inevitably produce nonlinear errors. At the same ti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/24G01B11/30
CPCG01B11/02G01B11/2441G01B11/30
Inventor 吴运权常素萍卢文龙刘晓军赵言情王浩
Owner HUAZHONG UNIV OF SCI & TECH
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