Four-stage fractional distillation type oil diffusion pump with flow distribution plate

Abstract

The invention discloses a four-stage fractional distillation type oil diffusion pump with a flow distribution plate. The four-stage fractional distillation type oil diffusion pump comprises a pump body with a built-in pump core, wherein an oil chamber is arranged at the bottom of the pump body; an air inlet is formed in the upper end of the pump body; a spraying nozzle is arranged at the bottom ofthe side end of the pump body; the spraying nozzle is externally connected with an exhausting pipe; a cooling water pipe is fixed at the periphery of the pump body; a supporting cover is fixed in theoil chamber; the supporting cover is composed of a supporting plate and a cylindrical pipe; the supporting cover is internally provided with a heating pipeline and the flow distribution plate locatedabove the heating pipeline; the flow distribution plate comprises a central blind plate, a first annular end plate and a second annular end plate; and the pump core is fixed at the upper side of thesupporting cover. The four-stage fractional distillation type oil diffusion pump is scientific and reasonable in structural design; the flow distribution plate is additionally arranged in the oil chamber and can be used for pre-guiding fractions, so that the ultimate vacuum degree which can be improved through distillation is increased; and meanwhile, the flow distribution plate is arranged so that the fractions which are volatilized before a boiling point is reached can be effectively intercepted and blocked, and furthermore, an oil returning phenomenon is greatly reduced and the utilizationeffect of the pump body is improved.

Description

technical field [0001] The invention relates to the technical field of oil diffusion pumps, in particular to a four-stage fractionation oil diffusion pump with a splitter plate. Background technique [0002] under 10 -2 The Torr pressure area is very important to modern industry and scientific research. High vacuum is widely used in melting and refining of active metals and refractory metals, decorative coating of plastics, etc. In order to obtain the required high vacuum, the most widely used pumping equipment is the diffusion pump. The diffusion pump pumps air with the help of a directional high-speed steam flow, which can obtain 10 -2 -10 -7 Torr or lower pressure at 10 -7 Baffles and cold traps are commonly used below Torr. Diffusion pump is high vacuum and ultra-high vacuum equipment, the combination of diffusion pump and cryopump can get 10 -14 Torr's vacuum. [0003] The traditional high vacuum oil diffusion pump has an air inlet on the top of the pump body, th...

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Problems solved by technology

There are many deficiencies in this high-vacuum oil diffusion pump. First, in order to make up for the lack of pumping speed, the middle end of the pump body expands the annular area of ​​the pump body so that the first-stage nozzle, the second-stage nozzle and the third-stage nozzle are in the pump body. The annular area of ​​the location is increased, that is, the pumping area is increased, and the processing of the pump body is more cumbersome, such as increasing the welding process of the pump body, frequent welding will reduce the air tightness of the diffusion pump, and the welding deformation of the material will increase, so The processing accuracy of the pump body is relatively high; second, there is no diverter plate in the oil chamber, and the fraction cannot be pre-guided, which reduces the ultimate vacuum that can be improved through distillation; third, although the vacuum oil diffusion pump is a return type of vacuum pump The pump body has a relatively small amount of oil, but there is still a certain amount of oil return. If it can be further reduced, the use effect of the vacuum oil diffusion pump will be greatly improved

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