A system and method for continuous hydrogen extraction and reuse of tail gas

Abstract

A system and method for continuous hydrogen extraction and reuse of tail gas. The tail gas from the LED epitaxial wafer production process passes through the filter and enters the first heat exchanger or the second heat exchanger to heat the metal hydride that has completed the hydrogen absorption reaction, so that The metal hydride releases hydrogen gas, which enters the water absorption unit after being cooled by the cooling device, and then the tail gas is dried by the water removal unit and enters the first metal hydride reactor or the second metal hydride reactor. The hydrogen in the tail gas and the first metal The hydrogen storage alloy or hydrogen storage single metal in the hydride reactor or the second metal hydride reactor reacts to form a metal hydride which is stored, the impurity gas is pumped away, and the metal hydride is heated by the high-temperature tail gas to release hydrogen. The waste heat of the process tail gas itself is used to drive the dehydrogenation process of the hydrogen storage reactor, which reduces the additional energy consumption required for heating during the temperature swing adsorption process of metal hydrides. The system is equipped with multiple reactors to realize continuous treatment of tail gas, ensuring continuous treatment of process tail gas and production of hydrogen.

Description

technical field [0001] The invention belongs to the field of tail gas treatment and recovery in the LED industry, and relates to a system and method for continuous hydrogen extraction and reuse of tail gas. Background technique [0002] Hydrogen, as an important industrial raw material and a major energy source in the future, is attracting attention and attention from all over the world. With the rapid development of my country's petrochemical, organic synthesis, semiconductor, glass, metallurgy, fuel cells and other fields, the demand for hydrogen has also increased greatly. Among them, ultra-pure hydrogen (hydrogen content ≥ 99.999%), an electronic special gas product, is a modern electronic product. , optical fiber, petrochemical and some important raw materials in cutting-edge technology, the demand for analysis and detection is also high, and the consumption is increasing year by year. [0003] Among them, a large amount of high-purity hydrogen is used in the production...

AI Technical Summary

Problems solved by technology

[0007] In order to overcome the problem that the tail gas in the tail gas of the MOCVD process cannot be efficiently recovered in the prior art, so as to save energy and protect the environment, the purpose of the present invention is to provide a system and method for continuous hydrogen extraction and reuse of tail gas

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