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Ignition chamber of quartz diffusion furnace

A technology of ignition chamber and diffusion furnace, applied in the field of diffusion furnace, can solve the problem of low safety of thermocouple

Active Publication Date: 2021-02-23
北京凯德石英股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In order to improve the common problem that the temperature measuring couple on the ignition chamber of the diffusion furnace is exposed and the safety is low, the application provides an ignition chamber of a quartz diffusion furnace

Method used

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  • Ignition chamber of quartz diffusion furnace
  • Ignition chamber of quartz diffusion furnace
  • Ignition chamber of quartz diffusion furnace

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Embodiment Construction

[0081] The following is attached Figure 1-6 The application is described in further detail.

[0082] The embodiment of the present application discloses an ignition chamber of a quartz diffusion furnace.

[0083] refer to figure 1 , an ignition chamber of a quartz diffusion furnace includes an ignition chamber body 1, a temperature measuring couple 11 is pierced on the ignition chamber body 1, and one end of the temperature measuring couple 11 extends into the ignition chamber body 1 for temperature measurement, and the temperature measuring couple 11 The other end is located outside the ignition chamber body 1, and the ignition chamber body 1 is provided with a protective device 2 for shielding the temperature measuring couple 11 outside the ignition chamber body 1.

[0084] refer to figure 1 and figure 2 The protective device 2 includes a protective cover 21 and a protective blade 22. The protective cover 21 is a hollow cylinder and is fixedly connected to the outer wa...

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Abstract

The invention relates to an ignition chamber of a quartz diffusion furnace, and belongs to the technical field of diffusion furnaces. The ignition chamber comprises an ignition chamber body; a temperature measuring couple is arranged on the ignition chamber body in a penetrating mode; a protective device used for shielding the temperature measuring couple is further arranged on the ignition chamber body; the protective device comprises a protective cover and a plurality of protective blades; the protective cover is fixedly connected to the ignition chamber body, and the temperature measuring couple is located in the protective cover; and the multiple protective blades are all rotationally connected to the protective cover, are arranged in the circumferential direction and shield the protective cover. The ignition chamber has the effect of shielding the protruding part of the temperature measuring couple so as to improve the safety.

Description

technical field [0001] The present application relates to the field of diffusion furnaces, in particular to an ignition chamber of a quartz diffusion furnace. Background technique [0002] Diffusion refers to the phenomenon that substance molecules transfer from high-concentration areas to low-concentration areas until they are uniformly distributed, and the rate is proportional to the concentration gradient of the substance. Diffusion is a phenomenon of mass transfer due to the thermal motion of molecules, mainly due to density differences. Diffusion technology is a basic and important semiconductor technology. [0003] Diffusion technology is mainly used to form base emitter and collector regions in bipolar devices, source and drain regions in MOS devices, polysilicon doping, etc. Diffusion technology is also called doping, which means doping one substance into another to form a p-n junction. [0004] For example, in the mass-produced crystalline silicon solar cell manu...

Claims

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Application Information

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IPC IPC(8): F27D21/00F27D1/18
CPCF27D1/1808F27D21/0014
Inventor 张忠恕陈强王连连张娟冯继瑶于洋边占宁张连兴李宝军赵晓亮李翔星卢亮周洁王笑波
Owner 北京凯德石英股份有限公司
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