Piezoelectric two-dimensional fast reflecting mirror without axial displacement and driving and deflection angle measuring method

Abstract

According to the piezoelectric two-dimensional fast steering mirror without axial displacement and the driving and deflection angle measuring method, the inverse piezoelectric effect is utilized, a piezoelectric stack is used as a driving element, two displacement amplification mechanisms and a double-shaft decoupling flexible hinge hooke joint are adopted, and the driving mirror drives the mirrorsurface to deflect. A strain gauge is pasted on the surface of the piezoelectric stack, the two-dimensional deflection angle is indirectly measured through strain bridge output, and an embedded circuit supports long-distance signal transmission. Piezoelectric stacks of the same specification are embedded in the two displacement amplifying mechanisms, and the working direction is the short side direction. One mode is that the displacement in the working direction is increased along with voltage rise after electrification, and the other mode is that the displacement in the working direction isreduced. Through the structural design, two displacement actuators can be equivalently contracted and extended at the same time through one voltage. The two displacement amplification mechanisms are oppositely installed under the same deflection shaft, the two piezoelectric stacks are connected in parallel, and along with the increase of voltage from zero, a deflection angle of the driven reflector is gradually increased from zero, and the mirror surface has no axial displacement in the deflection process.

Description

technical field [0001] The invention belongs to the field of light beam control, and in particular relates to a piezoelectric two-dimensional fast mirror without axial displacement and a method for measuring driving and deflection angles. Background technique [0002] The piezoelectric fast mirror mechanism has a compact structure and a small size, which can realize high-precision and high-bandwidth control of the beam, and is widely used in precision machining, bioengineering, laser communication and other fields. At present, the mainstream piezoelectric fast mirror mechanism at home and abroad mainly works in the differential drive mode, that is, before the deflection, the piezoelectric stack inside the fast mirror mechanism is generally extended to a certain position in the middle, and the overall mirror surface is lifted along the axial direction. raise. The axial movement of the deflection mirror often changes the design of the original optical path. By controlling th...

AI Technical Summary

Problems solved by technology

The existing fast mirror machine mechanism uses strain measurement to measure the deflection angle of the fast mirror. The signal line of the strain bridge is generally short, and the measurement noise will increase significantly during long-distance transmission, resulting in a significant decrease in control accuracy.

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