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Manufacturing process and application of flexible Raman enhanced intelligent sensing device suitable for rape crops

A technology of intelligent perception and manufacturing technology, applied in Raman scattering, metal material coating technology, instruments, etc., can solve the problem that the flexible Raman-enhanced substrate does not have stretchability, it is difficult to apply stress and strain sensing, and the sensing material layer is complex and other problems, to achieve the effect of in-situ detection, low cost, and simple production

Inactive Publication Date: 2021-02-09
HUAZHONG AGRI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The Chinese invention patent with the publication number CN107860760A discloses a three-dimensional flexible Raman-enhanced substrate of graphene oxide / silver nanoparticles / pyramidal PMMA, which can produce large bending deformation and can realize in-situ detection of curved surface probe molecules. However, the flexible Raman-enhanced substrate is not stretchable, so it is difficult to apply to stress-strain sensing. At the same time, the sensing material layer of the sensor is complex and the preparation efficiency is low.

Method used

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  • Manufacturing process and application of flexible Raman enhanced intelligent sensing device suitable for rape crops
  • Manufacturing process and application of flexible Raman enhanced intelligent sensing device suitable for rape crops
  • Manufacturing process and application of flexible Raman enhanced intelligent sensing device suitable for rape crops

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] The manufacturing process of the flexible Raman-enhanced intelligent sensing device suitable for rape crops as shown in the figure includes the following steps:

[0057] 1) Fabrication of silicon nano-grating template:

[0058] Select the silicon grating period, silicon grating height and duty cycle parameters according to the requirements of the sensing device, and use the electron beam etching method or deep ultraviolet etching method to make the silicon nano grating template; wherein, the silicon nano grating template has a "comb-like" structure ;

[0059] 2) Surface hydrophobization treatment of silicon nano-grating template:

[0060] The prepared silicon nano-grating template is placed in hydrophobic silane and soaked, so that the surface properties of the silicon nano-grating template are changed to a hydrophobic surface;

[0061] 3) Fabrication of molds for flexible Raman-enhanced intelligent perception devices:

[0062] Set the length, width, and size of the ...

Embodiment 2

[0075] Utilize the flexible Raman enhanced intelligent sensing device that the process of above-mentioned embodiment 1 is made to carry out the testing method of Raman enhanced experiment, comprise the following steps:

[0076] 1) Configure the calibration test analyte (such as R6g) into water solubility, then place the liquid analyte in the Raman-enhanced area of ​​the flexible Raman-enhanced intelligent sensing device, and then use a Raman spectrometer to analyze the Raman spectrum intensity of the R6g solution Variety. Then put the R6g solution with the same concentration on different substrates: silicon wafer substrate and Au substrate, and use Raman spectrometer to measure the spectral intensity of R6g solution, and conduct a comparative test on the flexible Raman enhanced intelligent sensing device, and draw the analyte R6g solution and Raman Optical curve (spectral intensity) between Mann spectral intensity I:

[0077] I=F(c);

[0078] like Figure 7 As shown, the si...

Embodiment 3

[0081] Utilize the flexible Raman-enhanced intelligent sensing device of making above-mentioned embodiment 1 to carry out the testing method of stress-strain, comprise the following steps:

[0082] 1) Place the flexible Raman-enhanced intelligent sensing device on the strain tensile tester, use the initial state as a calibration point, and set the initial strength value when the strain is 0 to I 0 ;

[0083] 2) When the flexible Raman-enhanced intelligent sensing device is strained by external force, the high-precision strain gauge records the real-time strain S of the sensing device, and the stress is σ;

[0084] 3) By establishing a corresponding relationship for all the strains S, the stress as σ and the length variation Δl of the corresponding flexible Raman-enhanced smart sensing device, the fitting function curve S=f(ΔL) and σ=f(Δl), The strain and stress in the actual environment state are measured by the real-time change value of the length change Δl.

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Abstract

The invention discloses a manufacturing process and application of a flexible Raman enhanced intelligent sensing device suitable for rape crops. According to the method, the flexible Raman enhanced intelligent sensing device is manufactured according to the following seven processes: silicon nano grating template manufacturing, surface hydrophobization treatment on the silicon nano grating template, flexible Raman enhanced intelligent sensing device mold manufacturing, flexible nano grating substrate material preparation, flexible nano grating substrate manufacturing, flexible nano grating polymer substrate stripping and precious metal film layer manufacturing, a surface plasma resonance effect is formed through a flexible nano grating polymer substrate and a precious metal film on the upper surface of the flexible nano grating polymer substrate, a local electric field of a sensing area is enhanced, and Raman enhancement is achieved through an enhanced electric field. The method has the advantages of being high in preparation stability, low in cost and capable of achieving large-scale production. The method can be applied to the field of oilseed rape crops, including accurate sensing and high-sensitivity detection of information such as sclerotinia rot of oilseed rape.

Description

technical field [0001] The invention relates to the field of micro-nano-opto-electromechanical systems, in particular to a manufacturing process and application of a flexible Raman-enhanced intelligent sensing device suitable for rapeseed crops. Background technique [0002] Raman-enhanced technique is a highly sensitive method widely used in chemical detection and biological analysis. The enhancement effect of Raman-enhanced smart sensing devices is realized through the micro / nanostructures, particles or colloids of noble metals. When excited by light, the electromagnetic field strength on the substrate of the Raman-enhanced smart sensing device is greatly increased, which can be used to enhance the Raman scattering signal of the analyte. Typically, the metallic sensing layer of a Raman-enhanced intellisense device is usually deposited on a rigid material such as glass or silicon. However, in many cases, Raman sensors based on rigid substrates are difficult to apply to de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G02B5/18C23C14/20
CPCC23C14/20C23C14/205G01N21/658G02B5/1857
Inventor 彭望廖庆喜丁幼春
Owner HUAZHONG AGRI UNIV
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