Microfluidic chip and manufacturing method thereof

Abstract

The invention provides a manufacturing method of a microfluidic chip. The manufacturing method comprises the following steps of: providing a substrate and a cover plate; setting a first mark on the substrate; setting a second mark on the cover plate; forming a microfluidic column group and a trench on the substrate; aligning the first mark with the second mark; acquiring a bonding structure, wherein the microfluidic column group and the cover plate form a microfluidic channel; and cutting the bonding structure by using a hybrid cutting process to obtain the independent microfluidic chip. Furthermore, the invention also provides the microfluidic chip, which comprises the substrate and the cover plate, wherein the substrate is provided with the microfluidic column group and the trench, and the cover plate is bonded on the substrate. According to the microfluidic chip, the first mark and the second mark are arranged and aligned so that the crystal orientation of the substrate and the crystal orientation of the cover plate can be kept consistent, then the situation that chipping impurities block the microfluidic channel in the chip can be avoided through a mixed cutting process, and the manufacturing yield of the microfluidic chip is increased.

Description

technical field [0001] The invention relates to the technical field of semiconductor device manufacturing, in particular to a microfluidic chip and a manufacturing method thereof. Background technique [0002] Microfluidics (Microfluidics) chip is a micron-level mechanical structure made of semiconductor MEMS technology, which is used to precisely control the movement of micro-scale fluids, thereby controlling the preparation, reaction, detection and other operations of substances in the fluid medium. , chemical, medical and other fields have broad application prospects. Take the atomization microfluidic chip as an example, which is a chip structure with multiple microfluidic channels integrated inside. The microfluidic channels control the compression or intersecting of multiple liquids at the outlet and produce collisions to atomize the liquid into micron-sized Liquid droplets are usually widely used in inhalation drug delivery devices. The atomization microfluidic chip i...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a microfluidic chip and its manufacturing method to solve the problem that the outlet and inlet of the microfluidic channel of the chip are blocked by impurities when manufacturing the microfluidic chip

In addition, by using single crystal silicon material with the same crystal orientation as the cover sheet and substrate, the problem of rough edges after laser stealth cutting of slivers is solved

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