Laser processing system and method for monitoring laser power changes
A technology of laser processing and laser power, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of poor laser cutting consistency and yield rate
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[0040]The present invention will be further described below in conjunction with the drawings.
[0041]A laser processing system for monitoring changes in laser power and position, including laser 101, beam expander 102, first beam splitter 103, positive lens 104, second beam splitter 105, integrator 106, energy detector 107, The negative lens 108, the PSD detector 109, the laser cutting head 110 and the workpiece table 111.
[0042]PSD detector: position sensitive detector.
[0043]The laser 101 is a high-power laser: the general power is above 10 watts;
[0044]The laser 101 provides a laser processing light source for a laser processing system. The laser 101 generates a laser beam with high repetition rate, high peak pulses and narrow line width (high repetition frequency: generally above 10KHz; high peak pulse: generally 0.1mJ Above; narrow line width: line width less than or equal to nanoseconds); preferably, the laser is a picosecond laser or a femtosecond laser;
[0045]The beam expander 102...
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