A three-dimensional integrated structure of nanocapacitor and its manufacturing method
A nano-capacitor, three-dimensional integration technology, applied in circuits, electrical components, electrical solid devices, etc., can solve problems such as single and increase storage capacity, reduce process steps, increase capacitance density, reduce interconnect resistance and The effect of energy loss
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[0024] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. It should be understood that the specific The examples are only used to explain the present invention, not to limit the present invention. The described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0025]In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "vertical" and "horizontal" are based on the orientation or positional relations...
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