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A method for cultivating artificial quartz crystal seed crystals with low corrosion tunnel density

A quartz crystal, low-corrosion technology, applied in crystal growth, chemical instruments and methods, single crystal growth, etc., can solve the problems of high internal stress, low utilization rate, and incomplete removal of corrosion tunnels in seed crystals, etc., to improve crystal quality Effect

Active Publication Date: 2022-02-01
SINOMA SYNTHETIC CRYSTALS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the crystal corrosion tunnel obtained by this method is fan-shaped in the +x crystal direction, and has a certain angle with the x crystal direction. Except for the parallel growth interface corrosion tunnel, which can be completely removed, the vertical and intersecting corrosion tunnels cannot be completely removed. The elimination rate of a single growth-corrosion tunnel is only about 50%, and the internal stress of the cultivated seed crystal is large and the utilization rate is low

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] 1) Select quartz crystal bulk seeds (corrosion tunnel density ≤ 30 / cm 2 ), length l=200mm, direction is crystal direction (y); width w=90mm, direction is crystal direction (x); thickness t=100mm direction is crystal direction (z); seed There are no knife marks on the surface of the crystal, and no twin crystals inside.

[0042] 2) Groove the quartz crystal seed crystal + x crystal direction, and make the seed crystal U-shaped, the groove depth h=80mm, the groove width w1=180mm, the U-shaped corner has arc-shaped chamfering, and the edge of the seed crystal in the groove Smooth without cracks and broken edges.

[0043] 3) Break high-quality quartz raw materials (Al content ≤ 10ppm) into 30-50mm size blocks, wash with water, alkali wash (1.5mol / L NaOH, normal temperature), wash and dilute (pH=7.2), and dry (120°C ) 3h, put into the dissolution zone at the lower part of the autoclave.

[0044] 4) Corroding the seed block with U-shaped groove (normal temperature, satu...

Embodiment 2

[0049] 1) Select quartz crystal bulk seeds (corrosion tunnel density ≤ 30 / cm 2 ), length l=180mm, direction is crystal direction (y); width w=80mm, direction is crystal direction (x); thickness t=60mm direction is crystal direction (z); seed There are no knife marks on the surface of the crystal, and no twin crystals inside.

[0050] 2) Make grooves in the quartz crystal seed crystal + x crystal direction, and make the seed crystal U-shaped, the groove depth h = 65mm, the groove width w1 = 160mm, there is an arc-shaped chamfer at the U-shaped corner, and the edge of the seed crystal in the groove Smooth without cracks and broken edges.

[0051] 3) Break high-quality quartz raw materials (Al content ≤ 10ppm) into 30-50mm size blocks, wash with water, alkali wash (1.2mol / L NaOH, normal temperature), wash and dilute (pH=7.5), and dry (120°C ) 3h, put into the dissolution zone at the lower part of the autoclave.

[0052] 4) Corroding the seed block with U-shaped groove (norm...

Embodiment 3

[0057] 1) Select quartz crystal bulk seeds (corrosion tunnel density ≤ 30 / cm 2 ), length l=200mm, direction is crystal direction (y); width w=80mm, direction is crystal direction (x); thickness t=80mm direction is crystal direction (z); seed There are no knife marks on the surface of the crystal, and no twin crystals inside.

[0058] 2) Groove the quartz crystal seed crystal + x crystal direction, make the seed crystal U-shaped, groove depth h = 70mm, groove width w1 = 180mm, U-shaped corners have arc chamfering, and the edge of the seed crystal in the groove Smooth without cracks and broken edges.

[0059] 3) Break high-quality quartz raw materials (Al content ≤ 10ppm) into 30-50mm size blocks, wash with water, alkali wash (1.2mol / L NaOH, normal temperature), wash and dilute (pH=7), and dry (120°C ) 3h, put into the dissolution zone at the lower part of the autoclave.

[0060] 4) Corroding the seed block with U-shaped groove (normal temperature, saturated NH 4 F, after...

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Abstract

The invention discloses a method for cultivating artificial quartz crystal seed crystals with low corrosion tunnel density. Crystal blocks; high-quality quartz raw materials are broken into blocks, washed with water, alkali washed, diluted with water, dried, and put into the dissolution zone at the lower part of the autoclave; On the side and bottom, the opening of the U-shaped groove hangs downwards on the crystal growth rack, and the crystal growth rack is placed in the upper growth area of ​​the autoclave; the U-shaped groove is filled to form a complete shape of the artificial quartz crystal. After the growth is stopped, the seeds are removed The original U-shaped part of the crystal is extracted, and the newly filled part of the quartz crystal in the U-shaped groove is extracted to obtain an artificial quartz crystal seed crystal with a low corrosion tunnel density. The invention can solve the seed crystal requirement for the growth of artificial quartz crystal with low corrosion tunnel density, and meet the miniaturization and high-frequency QMEMS manufacturing process application of the crystal oscillator element.

Description

technical field [0001] The invention belongs to the technical field of artificial crystals, and more specifically relates to a method for cultivating artificial quartz crystal seed crystals with low corrosion tunnel density. Background technique [0002] Quartz crystal (commonly known as crystal) is a piezoelectric functional crystal with a wide range of uses. Taking advantage of its high Q value and stable frequency-temperature characteristics, it can be used to manufacture crystal oscillator components that control and select frequencies, as a standard frequency source or pulse signal source. Provides a frequency reference. Quartz crystal is a key basic material in integrated circuits, and is widely used in 5G, industrial Internet, artificial intelligence, Beidou navigation, aerospace communications and other fields. [0003] With the advent of the 5G communication era and the development of the Internet of Things, communication networks are developing towards high-freque...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/18C30B35/00
CPCC30B29/18C30B35/00
Inventor 张绍锋张璇孙志文姜秀丽刘巨澜
Owner SINOMA SYNTHETIC CRYSTALS CO LTD
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