Flexible pressure sensor with microstructure

Abstract

The invention discloses a flexible pressure sensor with a microstructure. The flexible pressure sensor comprises an upper substrate and a lower substrate which face each other and are arranged at intervals, and an insulated microstructure array located between the upper substrate and the lower substrate; the microstructure array comprises a plurality of microstructures which are arranged on the inner surface of the upper substrate in an array mode; the microstructures extend towards the lower substrate; and the microstructures are connected with the upper substrate and the lower substrate andare used for contacting with the lower substrate to deform in a pressed process; each microstructure comprises a first part arranged on the inner surface of the upper substrate and a second part connected to the free end of the first part, wherein the first part is a prismoid, the end face of the second part is a cylindrical surface tangent to the first part, and the elastic modulus of the secondpart is smaller than that of the first part. The microstructure is designed to be provided with the first part and the second part which are connected with each other, and the two parts have differentshape structures and elastic modulus, so that the microstructure has high sensitivity and a wide linear response range, and the application range of the pressure sensor is widened.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible pressure sensor with a microstructure. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools , pipeline and many other industries. [0003] In recent years, due to the good biocompatibility of flexible sensors and a series of advantages such as wearability, real-time monitoring, and non-invasiveness, the development of flexible pressure sensors has gradually become a research hotspot, which can convert subtle mechanical information into Electroresponse has broad application prospects in the fields of human-computer interaction, electronic ...

AI Technical Summary

Problems solved by technology

[0005] In view of the deficiencies in the prior art, the present invention provides a flexible pressure sensor with a microstructure, which can solve the problem of high sensitivity and wide linear response range in traditional pressure sensors and ensure that the sensor has good performance

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