Surface coating method and equipment

A surface coating and equipment technology, applied in the field of surface coating methods and equipment, can solve the problems of high equipment requirements, poor adhesion, complex processes, etc., and achieve the effects of wide universality, easy implementation and simple operation.

Active Publication Date: 2020-11-06
SHENZHEN INST OF WIDE BANDGAP SEMICON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods can be applied to some fields in industrial production, but there are still some deficiencies. Electroplating will have problems such as missing plating, burrs, and coating damage; electroless plating needs to immerse the sample in an aqueous solution, and the adhesion is poor, and the surface of the sample is still Special treatment is required; advanced processes such as laser processing have high requirements for equipment, and the process is relatively complicated
In addition, there are etching, screen printing, coating, sol-gel and other film-forming methods, but the film-forming effect is not good, and post-treatment processes are required

Method used

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  • Surface coating method and equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] The nanoparticle aerosol preparation device communicates with the vacuum sample chamber through the critical hole, and the surface coating component and the sample multi-axis linkage platform are installed in the vacuum sample cavity, and the coated sample is placed on the sample multi-axis linkage platform. The nano aerosol is prepared by the aerosol device, and then follows the airflow through the critical hole, enters the surface coating part, and is coated on the sample on the sample multi-axis linkage platform through the nozzle. With the random movement and rotation of the sample, a thin film with uniform thickness is formed to realize the omni-directional coating of nanoparticles on the surface of the sample, and then the surface coating is heat treated by the heat source in the sample cavity.

[0044] Preferably, the nanoparticle aerosol preparation device is one of an electric spark discharge device, an arc discharge device, a thermal evaporation device, a chemical...

Embodiment 2

[0065] The cube sample is fixed on the multi-axis linkage platform of the vacuum sample chamber, and the sample chamber is evacuated. The nano-zinc aerosol is prepared by an electric spark discharge device, and nitrogen is introduced. The critical hole with a diameter of 0.02μm and a diameter of 0.1 are adopted. μm nozzle, adjust the moving speed and rotation speed of the sample multi-axis linkage platform, apply nano-zinc aerosol on the sample through the nozzle, and then heat it to 50℃ for 5 minutes by infrared rays to form a uniform and stable 1nm film. The film is resistant to sea water and atmospheric corrosion.

Embodiment 3

[0067] The bowl-shaped sample is fixed on the multi-axis linkage platform of the vacuum sample chamber, and the sample chamber is evacuated. Nano alumina aerosol is prepared by an arc discharge device, and argon is introduced. A critical hole with a diameter of 0.1μm and With a nozzle with a diameter of 10μm, adjust the moving speed and rotation speed of the sample multi-axis linkage platform, apply nano-alumina aerosol on the sample through the nozzle, and then heat it to 80℃ by microwave for 10 minutes to form a uniform and stable thickness of 5nm Film, this film is a good wear-resistant and heat-shielding material.

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Abstract

The invention discloses a surface coating method and equipment. The surface coating equipment comprises a nano-particle aerosol preparation device, a vacuum sample cavity and a sample multi-axis linkage platform. The nano-particle aerosol preparation device comprises a nano-particle aerosol preparation cavity and a coating component connected with the nano-particle aerosol preparation cavity. Thevacuum sample cavity is provided with a coating component connecting hole. The sample multi-axis linkage platform is arranged in the vacuum sample cavity and connected with a sample table. The coatingcomponent penetrates through the coating component connecting hole to stretch into the position of a sample in the vacuum sample cavity. The technology can replace current traditional coating processes of electroplating, chemical plating, physical vapor deposition, chemical vapor deposition and the like, nano aerosol of any materials can be used for coating the surfaces of samples of any shapes,sizes and structures, operation is simple and easy to achieve, and quite wide universality is achieved.

Description

Technical field [0001] The invention relates to the technical field of coating equipment, in particular to a surface coating method and equipment. Background technique [0002] In recent years, nanotechnology has achieved long-term development. In industrial production, it is generally necessary to coat a protective layer on the surface of the product not only to repair a large number of mechanical parts, but also to give the surface of the workpiece abrasion, corrosion and resistance. Engineering characteristics such as high temperature, oxidation resistance, thermal shock resistance, radiation resistance, heat insulation, and insulation. At present, there are many methods of surface coating. Some researchers use electroplating to use steel and other products with rust removed on the surface as the cathode, and pure copper plate as the anode, which is hung on the surface containing copper cyanide, sodium cyanide and sodium carbonate. Copper plating is carried out in alkaline el...

Claims

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Application Information

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IPC IPC(8): B05B16/20B05B13/02B05D3/02
CPCB05B16/20B05B13/0235B05D3/0263B05D3/029B05D3/0254
Inventor 张昱刘强高健崔成强叶怀宇张国旗
Owner SHENZHEN INST OF WIDE BANDGAP SEMICON
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