Infrared thermal detector and manufacturing method thereof

Abstract

The invention relates to the technical field of detectors, and particularly discloses an infrared thermal detector, which comprises a control circuit; the infrared thermosensitive unit which is connected with the control circuit; the packaging structure which is arranged on the control circuit; The control circuit comprises a signal reading circuit interface and a signal generating circuit interface; the packaging structure comprises a frame, a cap, a heater and a control line. The frame is fixed on the control circuit, and the bottom end of the frame is fixed on the signal generation circuitinterface; the cap is suspended on the frame and forms a closed cavity surrounding the infrared thermosensitive unit together with the frame; the heater is positioned on the cap; the control lines arelocated on the cap and in the frame respectively, and the heater is electrically connected with the signal generation circuit interface through the control lines. The invention further discloses a manufacturing method of the infrared thermal detector. The infrared thermal detector provided by the invention can realize radiation response self-test under simulated black body infrared thermal-electric conversion on the basis of not influencing the basic performance of the detector.

Description

technical field [0001] The invention relates to the technical field of detectors, in particular to an infrared thermal detector and a manufacturing method of the infrared thermal detector. Background technique [0002] Infrared radiation is a kind of electromagnetic wave energy that is ubiquitous in nature. All objects with a temperature higher than absolute zero will produce this radiation; detecting the infrared radiation of objects has a wide range of application requirements in many fields; according to the different ways of responding to infrared radiation, There are two types of infrared detectors: photon detection and thermal detection; among them, the infrared photon detector is mainly based on the photoelectric effect of infrared radiation, and the infrared thermal detector is based on the thermal effect of infrared radiation. Therefore, it can work at room temperature and has the characteristics of light weight, small size, low power consumption, and low cost. [...

AI Technical Summary

Problems solved by technology

[0003] The signal response is the output signal of the infrared heat detector caused by the incident radiation. According to the national standard, in the response test and calibration of the infrared heat detector, a black body is usually required to provide the standard radiation power, which brings expensive test equipment. , the complex problem of the test system; in order to simplify the test, patents CN106289537A, CN105444893B, and CN107036717B all propose to use heating resistors instead of black bodies to provide thermal radiation sources for thermopile, so as to realize the built-in self-test of thermopile, but these patents do not involve how Realized from the device level

[0004] The papers "Electrically Induced Stimuli For MEMS Self-Test" and "Built-in-self-test techniques for MEMS" proposed a method of introducing a self-test structure in the device, that is, introducing a heating resistor into the sensitive area of ​​the infrared thermal unit , to simulate the temperature change of the sensitive area caused by the black body through the heat generation of the heating resistor; there are two problems in this structure: first, the infrared radiation of the black body reaches the output response of the detector, and has undergone the conversion of three energy forms of infrared-thermal-electricity, while the sensitive The heating resistance in the sensitive area can only simulate the heat-electric conversion, so the heating resistance here cannot be completely equivalent to the black body; secondly, adding the heating resistance in the sensitive area will change the heat capacity and thermal conductivity of the infrared thermal unit, and finally Affects the detector's signal response

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