MEMS-based multi-stationary-phase micro packed column structure and preparation method thereof

A technology of packed column and stationary phase, applied in separation methods, chemical instruments and methods, solid adsorbent liquid separation, etc., can solve the problems of inconvenient portable instrument application, large pre-column pressure required for testing, and burden of carrier gas system, etc. Achieving the effect of being beneficial to portable applications, realizing multi-functionality, and reducing burden

Pending Publication Date: 2020-10-30
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the above-mentioned shortcoming of the prior art, the object of the present invention is to provide a MEMS-based multi-stationary-phase micro-packed column structure and a preparation method thereof, which are used to solve the problems of long analysis time and testing time in traditional packed columns in the prior art. The required large pre-column pressure will easily cause the burden of the carrier gas system and the application of portable instruments, and the use of a single stationary phase in the existing packed column can only separate a certain type of mixed components, while separating another Inconvenient use due to the need to replace the gas chromatographic column for gas-like components

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  • MEMS-based multi-stationary-phase micro packed column structure and preparation method thereof
  • MEMS-based multi-stationary-phase micro packed column structure and preparation method thereof
  • MEMS-based multi-stationary-phase micro packed column structure and preparation method thereof

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Embodiment 1

[0053] see figure 1 , the present invention provides a kind of preparation method based on MEMS (Microelectro Mechanical Systems, microelectromechanical system) multi-stationary-phase micro-packed column structure, the preparation method of described MEMS-based multi-stationary-phase micro-packed column structure can comprise the steps:

[0054] 1) providing a substrate, forming a patterned mask layer on the surface of the substrate, and the patterned mask layer defines the shape and position of the subsequently formed microchannel, micro barrier column assembly and micro screening column assembly;

[0055] 2) etching the substrate based on the patterned mask layer, so as to form the micro channel, the micro barrier pillar assembly and at least one micro screening pillar assembly on the surface of the substrate; The micro channel extends along the surface of the substrate, one end of the micro channel is an inlet end, and the other end is an outlet end; the micro blocking colu...

Embodiment 2

[0094] Please combine Figure 1 to Figure 8 refer to Figure 9 to Figure 10 , the present invention also provides a method for preparing a MEMS-based multi-stationary-phase micro-packed column structure. The preparation methods of the multi-stationary-phase micro-packed column structure of MEMS are roughly different, and the difference between the two is that in Embodiment 1, the number of prepared micro-screening column components 14 can be one, such as Figure 4 and Figure 5 Shown; And in the present embodiment, the quantity of described micro-screening column assembly 14 of preparation can be a plurality of, as Figure 9 and Figure 10 as shown, Figure 9 and Figure 10 The number of prepared micro-screening column assemblies 14 is three as an example, but in actual examples, the number of prepared micro-screening column assemblies 14 is not limited to this, and can also be two or four , five, six or even more and so on. A plurality of the micro-screening column ass...

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Abstract

The invention provides an MEMS-based multi-stationary-phase micro packed column structure and a preparation method thereof. The MEMS-based multi-stationary-phase micro packed column structure comprises a substrate, a micro-channel extending along the surface of the substrate is formed on the surface of the substrate, one end of the micro-channel is an inlet end, and the other end of the micro-channel is an outlet end; the structure further comprises a micro blocking column assembly which is located in the micro-channel and is close to the outlet end of the micro-channel, and at least one microscreening column assembly which is located in the micro-channel and located between the micro blocking column assembly and the inlet end of the micro-channel. According to the MEMS-based multi-stationary-phase micro packed column structure and the preparation method thereof, the micro blocking column assembly and the micro screening column assembly are arranged in the micro-channel; autonomous segmented filling of a stationary phase can be realized, one-time separation of various mixed gases is finally realized, the application range of the chromatographic column is expanded, and multifunction of the micro packed column structure is realized.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, in particular to a MEMS-based multi-stationary-phase miniature packed column structure and a preparation method thereof. Background technique [0002] Chromatography is a technology to realize the separation and detection of complex mixed components, and it is widely used in petrochemical, exploration, environmental monitoring and other fields. A traditional gas chromatograph consists of five main parts: carrier gas system, sample injector, chromatographic column, detector and data processing system. As one of the core components of the instrument, the chromatographic column directly determines the separation effect of the chromatograph. When the mixed tested sample and the mobile phase flow through the chromatographic column together, because the components of the tested sample have different distribution coefficients in the stationary phase, when the two phases move rel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/60B01D15/22
CPCB01D15/22G01N30/603G01N30/6039G01N30/606G01N30/6065G01N30/6069G01N30/6095
Inventor 冯飞杨雪蕾
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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