Method for drying silicon wafer cutting waste by fluidized bed

A technology of fluidized bed drying and silicon wafer cutting, which is applied in the directions of drying solid materials, heating to dry solid materials, and drying gas arrangement, etc. It can solve the problems of secondary oxidation, incomplete water removal, and low drying efficiency.

Inactive Publication Date: 2020-10-27
KUNMING UNIV OF SCI & TECH
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Problems solved by technology

[0003] The present invention aims at the high moisture content of the filter cake obtained after the silicon wafer cutting waste is press-filtered. Conventional steam drying, microwave drying and other methods are adopted, which not only have low drying efficiency and incomplete water removal, but also cause secondary oxidation of the silicon wafer cutting waste and To reduce the recovery rate of silicon and other problems, provide a method for fluidized bed drying of silicon wafer cutting waste, that is, to use fluidized bed drying to pretreat silicon wafer cutting waste, so that the moisture remaining in the silicon wafer cutting waste filter cake can be efficiently and quickly At the same time, it inhibits the oxidation of silicon particles in the drying process, improves the drying efficiency and reduces the moisture residue in the silicon wafer cutting waste, thereby improving the utilization efficiency of the silicon wafer cutting waste in the subsequent process and improving the recovery rate of silicon

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  • Method for drying silicon wafer cutting waste by fluidized bed
  • Method for drying silicon wafer cutting waste by fluidized bed

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Embodiment 1: a kind of method of fluidized bed drying silicon chip cutting waste (see figure 1 ),Specific steps are as follows:

[0033] (1) Use a plate and frame filter press to remove water from the silicon wafer cutting waste slurry (solid content > 40%) in a certain place in Yunnan, remove liquids such as water-based lubricants, and achieve preliminary liquid-solid separation to obtain a silicon wafer cutting waste filter cake (moisture content is about 30%);

[0034] (2) Mechanically crushing and sieving the silicon wafer cutting waste filter cake in step (1) to obtain silicon wafer cutting waste powder with a particle size of 0.5-30 mm;

[0035] (3) The fresh or recovered and purified nitrogen drying medium is stored in the protective gas storage device, the nitrogen is boosted and supplied by the booster fan, and the air pressure buffer device adjusts the supplied gas to the required pressure and flow before supplying it to the hot blast stove It is used with ...

Embodiment 2

[0037] Embodiment 2: a kind of method of fluidized bed drying silicon chip cutting waste (see figure 1 ),Specific steps are as follows:

[0038] (1) Use a plate and frame filter press to remove water from the silicon wafer cutting waste slurry (solid content > 50%) in a certain place in Jiangsu, remove liquids such as water-based lubricants, and achieve preliminary liquid-solid separation to obtain a silicon wafer cutting waste filter cake (moisture content is about 22%);

[0039] (2) Mechanically crushing and sieving the silicon wafer cutting waste filter cake in step (1) to obtain silicon wafer cutting waste powder with a particle size of 0.5-30 mm;

[0040] (3) The fresh or recovered and purified nitrogen drying medium is stored in the protective gas storage device, the nitrogen is boosted and supplied by the booster fan, and the air pressure buffer device adjusts the supplied gas to the required pressure and flow before supplying it to the hot blast stove Used with a flu...

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Abstract

The invention relates to a method for drying silicon wafer cutting waste by a fluidized bed, and belongs to the technical field of recycling of silicon secondary resources. The method aims at the problems that the moisture content of a filter cake after pressure filtration of the silicon wafer cutting waste is high, and conventional steam drying, microwave drying and other methods are adopted, sothat the drying efficiency is low, the moisture removal is incomplete, and secondary oxidation of the silicon wafer cutting waste and reduction of a recovery rate of the silicon are caused and the like, and the fluidized bed drying treatment of the silicon wafer cutting waste is provided. The fluidized bed drying is carried out in advance before the silicon wafer cutting waste is subjected to high-temperature treatment and recycling, so that the moisture remaining in the filter cake of the silicon wafer cutting waste is efficiently and rapidly removed, and meanwhile, the oxidation of silicon particles in a drying process is inhibited. The moisture content in raw materials is reduced through the fluidized bed drying, so that the drying efficiency is improved, the utilization efficiency of the silicon wafer cutting waste in the subsequent process is improved, and the recovery rate of the silicon is further improved. The dried silicon wafer cutting material can be directly smelted to recover the silicon, or combined with a silicon raw material for refining.

Description

technical field [0001] The invention relates to a method for drying silicon chip cutting waste in a fluidized bed, and belongs to the technical field of silicon secondary resource regeneration and utilization. Background technique [0002] In the current crystalline silicon slicing process in China, it is inevitable that nearly 30% of high-purity silicon enters the silicon wafer cutting waste in the form of cutting debris. The resulting filter cake waste still contains 30-50% of the attached moisture residue. The residual moisture not only increases the subsequent transportation cost, but also causes the surface oxidation and heating of the ultrafine silicon particles, which not only increases the safety hazard of storage, but also reduces the silicon recovery rate. If the undried and dehydrated silicon wafer cutting waste is directly processed in the subsequent material preparation process, it is easy to cause production safety accidents, aggravate the secondary oxidation ...

Claims

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Application Information

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IPC IPC(8): F26B3/08F26B21/14F26B25/00
CPCF26B3/08F26B21/14F26B25/00F26B25/009F26B2200/04F26B21/12
Inventor 魏奎先杨时聪马文会
Owner KUNMING UNIV OF SCI & TECH
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