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Contact type probe of three-coordinate measuring machine

A three-coordinate measuring machine and contact technology, which is applied in the direction of point coordinate measurement, force measurement, and measurement devices, can solve the problems of inaccurate measurement of non-contact probes, achieve high strength, improve precision, good repeatability and stability sexual effect

Pending Publication Date: 2020-10-13
青岛信号栅精密仪器有限公司
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Problems solved by technology

[0005] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a contact probe of a three-coordinate measuring machine. The technical problem to be solved by the present invention is: how to measure the Workpieces with features such as slopes, steps, deep holes, chamfers, arcs, transparent bodies, etc.

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  • Contact type probe of three-coordinate measuring machine
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  • Contact type probe of three-coordinate measuring machine

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Embodiment Construction

[0019] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; Fully conveyed to those skilled in the art. The drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted.

[0020] Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more example embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of example embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of ...

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Abstract

The invention discloses a contact type probe of a three-coordinate measuring machine, and specifically relates to the field of three-coordinate measuring machines. The contact type probe comprises a probe outer shell, wherein a measuring mechanism and a measuring ball are arranged at the bottom part of the probe otuer shell; the measuring ball is positioned at the bottom part of the measuring mechanism; the measuring mechanism comprises a connecting rod, a connecting piece and a sensor target piece; the sensor target piece is movably connected between the connecting rod and the connecting piece; the connecting rod is fixedly connected with the measuring ball; a fixing piece is fixedly arranged at the end, away from the sensor target piece, of the connecting piece; the fixing piece is fixedly connected with the bottom part of the probe outer shell; and a capacitance sensor is fixedly arranged at the top part of the sensor target piece. By arranging the measuring mechanism, the measuringresolution of the three-coordinate measuring machine can reach 3 nm, the measuring range of the three-coordinate measuring machine can reach 20 mu m, the precision of the three-coordinate measuring machine is improved, and the three-coordinate measuring machine can be used for measuring workpieces which cannot be measured by a non-contact probe or cannot be measured precisely by the same and havethe features of slopes, steps, deep holes, chamfers, arcs, transparent bodies and the like.

Description

technical field [0001] The invention relates to the field of three-coordinate measuring machines, and more specifically, the invention relates to a contact probe of a three-coordinate measuring machine. Background technique [0002] In recent years, micro-electro-mechanical systems (MEMS) technology has developed rapidly, and various micro-devices have come out one after another, such as: micro-turbos, micro-needle arrays, piezoelectric motors, micro-lenses, LIGA products, and fuel injectors. The geometric feature size of the nanometer ranges from a few micrometers to a few millimeters. [0003] To ensure the processing quality of MEMS devices, it is necessary to have corresponding high-precision detection methods and technologies, and the existing non-contact probes cannot measure or are inaccurate. Therefore, there is a need for a nano three-dimensional coordinate measuring machine and a measuring probe that can be used for measuring the three-dimensional characteristic d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/008G01L1/14
CPCG01B7/008G01L1/14
Inventor 王宗省刘珠荣于明州
Owner 青岛信号栅精密仪器有限公司
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