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Composite structure array probe for lath testing and optical fiber white light interference device

A composite structure, array probe technology, applied in measurement devices, optical testing flaws/defects, phase influence characteristic measurement, etc., can solve problems such as single function, reduce mechanical movement, improve cross-section scanning efficiency, and facilitate automatic adjustment.

Active Publication Date: 2020-09-22
HARBIN ENG UNIV
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Problems solved by technology

[0005] The purpose of the present invention is to provide a composite structure array probe and optical fiber white light interference device for slab testing, aiming at the requirements of laser slab crystal quality inspection, propose Array probes arranged in a new composite structure solve the problem of single function of traditional array probes, and improve the optical fiber white light interference device for slab testing. Through the combination of ring alignment array and square measurement array, with optical switch and array detection, the slab Automatic alignment and debugging during the test, improving the scanning test efficiency in the direction of the slab section, and reducing the mechanical scanning displacement error

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Embodiment Construction

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0019] The invention belongs to the field of research and development of quality detection devices for laser slab crystals, and relates to an optical fiber white light interferometry device equipped with an array probe, in particular, an array probe with a composite structure arrangement is innovatively proposed. fiber optic array probes such as figure 1 , consisting of measuring probes 41 arranged in 4×4, and an alignment probe array in the central part, wherein the alignment probe array includes a transmitting sub-probe 42, and a receiving probe array 43 for reflecting light spots, and the front end is equipped with a self-focusing lens array to perform The light path is collimated.

[0020] An array probe matching the composite structure arrangement proposes a new type of slat detection device, such as figure 2 , including a lig...

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Abstract

The invention provides a composite structure array probe for lath testing and an optical fiber white light interference device. The composite structure array probe is composed of measurement probes arranged in a 4*4 manner and a central part alignment probe array, the alignment probe array comprises a transmitting sub-probe and a receiving probe array for reflecting light spots, and the front endof the alignment probe array is provided with a self-focusing lens array for light path alignment. The invention further provides a novel batten detection device matched with the array probe arrangedin the composite structure. The novel batten detection device comprises a light source, a 1*2 coupler 1, an optical switch, a composite array probe, a to-be-detected batten, a displacement adjusting frame, a detector array used for alignment detection, a software driver, a second 2*2 coupler, a Faraday rotator mirror, a delay line structure, an interference signal detection module and an optical element, in the device, an optical element is connected through a single-mode optical fiber, and a software driving part is connected through a circuit to control and receive signals. High-precision ultra-large dynamic range detection of a lath weak reflection area can be realized.

Description

technical field [0001] The invention relates to a composite structure array probe and an optical fiber white light interference device for slab testing, and belongs to the field of research and development of quality detection devices for laser slab crystals. Background technique [0002] Laser slab crystal is one of the three major elements that constitute a solid-state laser, that is, a kind of gain medium, usually referring to doped YAG slab crystal. With the increasing demand for ultra-high power solid-state lasers, especially in the field of national defense and military, the quality requirements for laser slab crystals are getting higher and higher, which is essential for the detection of slab quality. Existing detection techniques for micro-defects in lath crystals mainly focus on several important detection parameters, including: surface cleavage streaks and cracks, dislocations and twins in lath crystals and inclusions, and in lath crystals. stress, the overall lig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01N21/88G01N21/45
CPCG01N21/95G01N21/8806G01N21/45G01N2021/458G01N2021/451
Inventor 张建中马占宇柴全苑勇贵王钢王超
Owner HARBIN ENG UNIV
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