Composite structure array probe for lath testing and optical fiber white light interference device
A composite structure, array probe technology, applied in measurement devices, optical testing flaws/defects, phase influence characteristic measurement, etc., can solve problems such as single function, reduce mechanical movement, improve cross-section scanning efficiency, and facilitate automatic adjustment.
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[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0019] The invention belongs to the field of research and development of quality detection devices for laser slab crystals, and relates to an optical fiber white light interferometry device equipped with an array probe, in particular, an array probe with a composite structure arrangement is innovatively proposed. fiber optic array probes such as figure 1 , consisting of measuring probes 41 arranged in 4×4, and an alignment probe array in the central part, wherein the alignment probe array includes a transmitting sub-probe 42, and a receiving probe array 43 for reflecting light spots, and the front end is equipped with a self-focusing lens array to perform The light path is collimated.
[0020] An array probe matching the composite structure arrangement proposes a new type of slat detection device, such as figure 2 , including a lig...
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