Ultra-smooth tungsten disulfide/hydrogen-containing carbon film and preparation method thereof

A technology of tungsten disulfide and carbon film, which is applied in the field of solid superlubricity and tribology, can solve difficult engineering applications and other problems, and achieve high order, reliable selection, and good wear resistance

Active Publication Date: 2020-07-28
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the reports on superslip are all focused on the surface of microscopic two-dimensional layered materials, which is difficult to realize engineering applications.
Although it has been reported that graphene can be introduced into the working interface to achieve large-scale superslip, how to prepare uniform two-dimensional layered materials on the complex surface of mechanical parts is still a challenge.

Method used

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  • Ultra-smooth tungsten disulfide/hydrogen-containing carbon film and preparation method thereof
  • Ultra-smooth tungsten disulfide/hydrogen-containing carbon film and preparation method thereof
  • Ultra-smooth tungsten disulfide/hydrogen-containing carbon film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0035] (1) Ultrasonic cleaning the base material (which can be bearing steel, gear steel, etc.) to remove rust spots and dirt, check the surface of the plated parts after cleaning to ensure that there are no rust spots and defects; put it into the vacuum coating chamber, and evacuate to Below 0.001 Pa, start coating;

[0036] (2) Using hollow cathode plasma to prepare hydrogen-containing carbon film, the specific steps are:

[0037] a. Inject argon gas at 2Pa, hollow cathode current 300-400A, bias voltage 800V, duty cycle 80%, and clean for 30 minutes to further remove pollutants on the surface of the workpiece;

[0038] b. Replace argon with 2Pa 5% silane gas mixture, hollow cathode current 300A, bias voltage 200-400V, duty cycle 80%, deposit silicon bonding layer for 30 minutes;

[0039] c. Gradually feed methane within 30 minutes until the gas mixture ratio of methane and 5% silane is listed as 1:1 and keep for 20 minutes;

[0040] d. Turn off the 5% silane mixed gas, fee...

Embodiment 2

[0044] (1) Ultrasonic cleaning the base material (which can be bearing steel, gear steel, etc.) to remove rust spots and dirt, check the surface of the plated parts after cleaning to ensure that there are no rust spots and defects; put it into the vacuum coating chamber, and evacuate to Below 0.001 Pa, start coating;

[0045] (2) The anode layer ion source is used to assist in the preparation of hydrogen-containing carbon films, and the specific steps are:

[0046] a. Introduce 3Pa argon gas, anode layer ion source voltage 1500-2000V, bias voltage 800V, duty cycle 60%, and clean for 30 minutes to further remove pollutants on the surface of the workpiece;

[0047] b. Replace the argon gas with 2Pa 5% silane gas mixture, the anode layer ion source voltage is 1000-1200V, the bias voltage is 200-400V, the duty cycle is 60%, and the silicon bonding layer is deposited for 40 minutes;

[0048] c. Gradually introduce methane within 30 minutes, until the ratio of methane and 5% silane g...

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Abstract

The invention discloses an ultra-smooth tungsten disulfide/hydrogen-containing carbon film. A double-layer film system is constructed on the surface of a substrate, and the double-layer film system comprises a hydrogen-containing carbon film body attached to the surface of the substrate and a WS2 ball film attached to the surface of the carbon film body. The hydrogen-containing carbon film-tungsten disulfide double-layer film system is formed by the carbon film body prepared through a plasma vapor deposition method and the WS2 ball film body prepared through a high-power pulse magnetron sputtering technology, tungsten disulfide catalyzes hydrogen-containing diamond carbon films to generate two-dimensional graphene in situ, multi-phase interface non-commensurability contact is formed through heterogeneous contact of the tungsten disulfide and the two-dimensional graphene, structural ultra-smoothness is achieved, and therefore ultra-smoothness in the atmosphere and argon atmosphere high-load environment on macroscale is achieved.

Description

technical field [0001] The invention relates to the preparation of a composite hydrogen-containing carbon film, in particular to a super-smooth tungsten disulfide / hydrogen-containing carbon film and a preparation method thereof, belonging to the technical fields of solid super-slip and tribology. Background technique [0002] In recent years, with the development of engineering technology, the working conditions of equipment operation have become more and more complex and diverse, which put forward higher requirements for low energy consumption, high reliability and long life of moving parts. Especially in the motion pair interface without oil lubrication, how to reduce the adhesive wear caused by high friction, high temperature, and even equipment downtime caused by friction welding, etc., have seriously affected the high reliability and long-life operation of major construction machinery equipment. [0003] Super-slip, specifically refers to the state where the friction co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/04C23C14/06C23C14/35C23C16/30C23C16/50
CPCC23C28/046C23C14/0623C23C14/35C23C16/30C23C16/50
Inventor 张斌张俊彦贾倩强力高凯雄张兴凯
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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