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A kind of ultra-smooth tungsten disulfide/hydrogen-containing carbon film and its preparation method

A technology of tungsten disulfide and carbon thin film, which is applied in gaseous chemical plating, superimposed layer plating, vacuum evaporation plating, etc., can solve difficult engineering applications and other problems, and achieve reliable selection, improved lubrication performance, and wear resistance good performance

Active Publication Date: 2022-02-01
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the reports on superslip are all focused on the surface of microscopic two-dimensional layered materials, which is difficult to realize engineering applications.
Although it has been reported that graphene can be introduced into the working interface to achieve large-scale superslip, how to prepare uniform two-dimensional layered materials on the complex surface of mechanical parts is still a challenge.

Method used

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  • A kind of ultra-smooth tungsten disulfide/hydrogen-containing carbon film and its preparation method
  • A kind of ultra-smooth tungsten disulfide/hydrogen-containing carbon film and its preparation method
  • A kind of ultra-smooth tungsten disulfide/hydrogen-containing carbon film and its preparation method

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Experimental program
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Effect test

Embodiment 1

[0035] (1) Ultrasonic cleaning the base material (which can be bearing steel, gear steel, etc.) to remove rust spots and dirt, check the surface of the plated parts after cleaning to ensure that there are no rust spots and defects; put it into the vacuum coating chamber, and evacuate to Below 0.001 Pa, start coating;

[0036] (2) Using hollow cathode plasma to prepare hydrogen-containing carbon film, the specific steps are:

[0037] a. Inject argon gas at 2Pa, hollow cathode current 300-400A, bias voltage 800V, duty cycle 80%, and clean for 30 minutes to further remove pollutants on the surface of the workpiece;

[0038] b. Replace argon with 2Pa 5% silane gas mixture, hollow cathode current 300A, bias voltage 200-400V, duty cycle 80%, deposit silicon bonding layer for 30 minutes;

[0039] c. Gradually introduce methane within 30 minutes, until the ratio of methane and 5% silane gas mixture is 1:1, keep for 20 minutes;

[0040] d. Turn off the 5% silane mixed gas, feed the s...

Embodiment 2

[0044] (1) Ultrasonic cleaning the base material (which can be bearing steel, gear steel, etc.) to remove rust spots and dirt, check the surface of the plated parts after cleaning to ensure that there are no rust spots and defects; put it into the vacuum coating chamber, and evacuate to Below 0.001 Pa, start coating;

[0045] (2) The anode layer ion source is used to assist in the preparation of hydrogen-containing carbon films, and the specific steps are:

[0046] a. Introduce 3Pa argon gas, anode layer ion source voltage 1500-2000V, bias voltage 800V, duty cycle 60%, and clean for 30 minutes to further remove pollutants on the surface of the workpiece;

[0047] b. Replace the argon gas with 2Pa 5% silane gas mixture, the anode layer ion source voltage is 1000-1200V, the bias voltage is 200-400V, the duty cycle is 60%, and the silicon bonding layer is deposited for 40 minutes;

[0048] c. Gradually introduce methane within 30 minutes, until the ratio of methane and 5% silane g...

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Abstract

The invention discloses a super-smooth tungsten disulfide / hydrogen-containing carbon film. A double-layer film system is constructed on the surface of a substrate. The double-layer film system includes a hydrogen-containing carbon film attached to the surface of the substrate and a carbon film attached to the surface of the carbon film. WS 2 ball film. The present invention is prepared by the carbon film prepared by the plasma vapor deposition method and the WS prepared by the high-power pulse magnetron sputtering technology 2 Thin film balls constitute a hydrogen-containing carbon film-tungsten disulfide double-layer film system. Under the action of friction heat during the friction process, tungsten disulfide catalyzes the hydrogen-containing diamond-like carbon film to generate two-dimensional graphene in situ. The heterogeneous contact forms the non-commensurate contact of the multiphase interface to realize the superlubricity of the structure, thus realizing the superlubricity in the high-load environment of the atmosphere and argon atmosphere on the macro scale.

Description

technical field [0001] The invention relates to the preparation of a composite hydrogen-containing carbon film, in particular to a super-smooth tungsten disulfide / hydrogen-containing carbon film and a preparation method thereof, belonging to the technical fields of solid super-slip and tribology. Background technique [0002] In recent years, with the development of engineering technology, the working conditions of equipment operation have become more and more complex and diverse, which put forward higher requirements for low energy consumption, high reliability and long life of moving parts. Especially in the motion pair interface without oil lubrication, how to reduce the adhesive wear caused by high friction, high temperature, and even equipment downtime caused by friction welding, etc., have seriously affected the high reliability and long-life operation of major construction machinery equipment. [0003] Super-slip, specifically refers to the state where the friction co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/04C23C14/06C23C14/35C23C16/30C23C16/50
CPCC23C28/046C23C14/0623C23C14/35C23C16/30C23C16/50
Inventor 张斌张俊彦贾倩强力高凯雄张兴凯
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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