Multifunctional vacuum pump testing cover

A vacuum pump and test cover technology, which is applied in the field of vacuum pump testing, can solve the problems of single function, difficulty in ensuring the accuracy and reliability of test results, etc., and achieve the effects of improving accuracy, avoiding uneven pressure, and uniform heating

Active Publication Date: 2020-07-03
NORTHEASTERN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, most vacuum pump manufacturers need to perform pumping performance indicators on vacuum pump products in accordance with relevant technical standards. The pumping performance indicators include multiple indicators such as pumping speed, ultimate vacuum ...

Method used

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  • Multifunctional vacuum pump testing cover
  • Multifunctional vacuum pump testing cover
  • Multifunctional vacuum pump testing cover

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Such as Figure 1~2 As shown, the present embodiment provides a kind of internal volume is 1m 3 Horizontal multifunctional vacuum pump test cover, wherein one side of the casing 14 is provided with an openable first sealing cover 1, and the other side is fixed with a second sealing cover with the first pump port 12 to be tested and the second pump port 13 to be tested. Cover 11, the first sealing cover 1 and the second sealing cover 11 are both spherical, and due to the special gas environment of the vacuum in the vacuum test cover, the welding method of the second sealing cover 11 adopts the welding method of internal welding continuous welding, and Add external welding intermittent welding to the position where high strength is required to supplement the strength. In addition, in order to increase the water cooling area and improve the water cooling effect, the outer casing 14 and the first sealing cover 1 and the second sealing cover 11 are equipped with water coolin...

Embodiment 2

[0046] Such as image 3 As shown, the difference between this embodiment and Embodiment 1 is that this embodiment is a vertical vacuum pump test cover with an inner volume of 100 L, and the main air suction port 15 must be located at the end of the shell 14 away from the first sealing cover 1 .

[0047] In this embodiment, the inner diameter D of the casing 14 is selected as 400mm according to the industry standard, and the end of the casing 14 away from the first sealing cover 1 is welded with a flange 29, and the main air inlet 15 is located in the middle of the flange 29, The arrangement of the water-cooling tubes 18 is based on the water-cooling capacity requirements, and only the water-cooling tubes 18 need to be arranged on the shell 14 , and the water-cooling tubes 18 do not need to be arranged on the first sealing cover 1 .

[0048] In this embodiment, in addition to the main suction port 15 and the coarse suction port 10, the plurality of suction ports also includes ...

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Abstract

The invention relates to the field of vacuum pump testing, in particular to a multifunctional vacuum pump testing cover comprising a shell, a water cooling pipe, a heating wire and a reflecting cover;the water cooling pipe is arranged outside the shell, the reflecting cover and the heating wire are arranged inside the shell, an openable first sealing cover is arranged at one end of the shell, andthe other end of the shell is closed and is provided with a to-be-tested pump port; and the shell is provided with an air inlet, a temperature measuring port, a pressure measuring port, a PIV observation port and a plurality of air pumping ports, wherein the air pumping ports comprise a main air pumping port connected with a main pump and a rough pumping port connected with a rough pumping pump.The multifunctional vacuum pump testing cover integrates a series of functions of heating, cooling, air exhaust, air intake, pressure measurement, temperature measurement and PIV observation and can enable the gas environment in the vacuum pump testing cover to meet the requirement for the performance test of the vacuum pump; and simultaneously, the stability and the accuracy of the test result are improved.

Description

technical field [0001] The invention relates to the field of vacuum pump testing, in particular to a multifunctional vacuum pump testing cover. Background technique [0002] In recent years, with the large-scale rise of emerging strategic industries such as semiconductor electronics, photovoltaics, flat panel displays, semiconductor lighting, and solar photovoltaics, as well as the industrial upgrading of traditional industries such as chemical, pharmaceutical, and food packaging, the demand for vacuum pumps in various industries is increasing. There are many, and the requirements for vacuum pumps are becoming more and more stringent, so in order to ensure product quality, the performance test of vacuum pumps before leaving the factory is becoming more and more important. [0003] At present, most vacuum pump manufacturers need to perform pumping performance indicators on vacuum pump products in accordance with relevant technical standards. The pumping performance indicators...

Claims

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Application Information

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IPC IPC(8): F04B51/00
CPCF04B51/00
Inventor 刘坤张朔熙王光玉孔祥玲刘志东迟小宇谢元华郝明巴德纯
Owner NORTHEASTERN UNIV
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