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Super-hydrophobic diamond-like carbon composite layer structure and preparation method thereof

A diamond layer and diamond technology, which is applied in the field of super-hydrophobic diamond-like carbon composite layer structure and its preparation, can solve the problem that the diamond-like carbon coating does not have hydrophobicity, etc., and achieve the effects of preventing peeling, improving adhesion and firm bonding

Active Publication Date: 2020-06-19
SHENZHEN INST OF ADVANCED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a super-hydrophobic diamond-like composite layer structure and its preparation method, aiming to solve the problem that the existing diamond-like coatings do not possess hydrophobicity

Method used

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  • Super-hydrophobic diamond-like carbon composite layer structure and preparation method thereof
  • Super-hydrophobic diamond-like carbon composite layer structure and preparation method thereof
  • Super-hydrophobic diamond-like carbon composite layer structure and preparation method thereof

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preparation example Construction

[0063] Another aspect of the embodiments of the present invention provides a method for preparing a diamond-like composite layer structure, comprising the following steps:

[0064] S01. Provide a substrate, and sequentially perform pretreatment, glow cleaning and ion etching cleaning on the substrate;

[0065] S02. Place the cleaned substrate in the deposition chamber, inject argon gas, adjust the pressure of the vacuum chamber to 0.2-1.3Pa, turn on the first target and the second target, and control the target of the first target The power is 30-70W, the target power of the second target is controlled to be 30-70W, and the prefabricated transition layer is deposited under the condition that the substrate bias voltage is 100-300V;

[0066] S03. The sample deposited with the prefabricated transition layer is taken out, placed in a container filled with etching solution, subjected to ultrasonic treatment, and the prefabricated transition layer is etched to form a transition laye...

Embodiment 1

[0105] A preparation method of a diamond-like composite layer structure, comprising the following steps:

[0106] S11. Provide a substrate, and sequentially perform pretreatment, glow cleaning and ion etching cleaning on the substrate; specifically:

[0107] Put the substrate into distilled water and ultrasonically clean it for 5 to 30 minutes, then put the substrate into an acetone solution and ultrasonically clean it for 5 to 30 minutes, and then put the substrate into an anhydrous ethanol solution and ultrasonically clean it for 5 to 30 minutes; After finishing, dry the surface of the substrate with dry nitrogen, and finally put the sample into a blast drying oven for drying at 80-150°C. Before glow cleaning, adjust the equipment parameters, specifically, fix the dried substrate on the turntable in the ion source coating equipment; close the vacuum chamber door, turn on the water cooler to set the ion source, multi-arc target, Connect the water circuit of the molecular pum...

Embodiment 2

[0114] A method for preparing a diamond-like composite layer structure differs from Example 1 in that: the first target material is a metal copper target, the second target material is a metal aluminum target, and the etching solution is potassium hydroxide solution.

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Abstract

The invention provides a preparation method of a diamond-like carbon composite layer structure. The preparation method comprises the following steps of providing a substrate, and sequentially carryingout pretreatment, glow cleaning and ion etching cleaning on the substrate; placing the cleaned substrate in a deposition chamber, introducing argon gas, adjusting the pressure intensity of a vacuum chamber to 0.2-1.3 Pa, starting a first target material and a second target material, controlling the target power of the first target material to 30-70W, controlling the target power of the second target material to 30-70W, and depositing a prefabricated transition layer under the condition that the bias voltage of the substrate is 100-300V; taking out the sample deposited with the prefabricated transition layer, placing the sample in a container containing an etching solution, carrying out ultrasonic treatment, etching the prefabricated transition layer to form a transition layer with a micro-nano structure array on the surface so as to obtain an etched sample; and after cleaning the surface of the etched sample, placing the etched sample in the deposition chamber, and depositing a diamond-like layer on the surface of the transition layer of the etched sample.

Description

technical field [0001] The invention belongs to the technical field of diamond-like coatings, and in particular relates to a superhydrophobic diamond-like composite layer structure and a preparation method thereof. Background technique [0002] In recent years, superhydrophobic materials with special wetting properties have attracted widespread attention. Superhydrophobic materials are widely used in medical biology, industrial and agricultural production, and daily life, such as self-cleaning materials, oil-water separation materials, anti-fouling fabrics, and drag-reducing materials. It has extremely broad application prospects. However, the superhydrophobic materials currently researched are complex in preparation process and high in cost, and the hardness of the prepared superhydrophobic materials is not high, which cannot meet the requirements of diversified materials. Therefore, the method of developing a high-hardness, super-hydrophobic material has an important role...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06C23C14/02
CPCC23C14/325C23C14/0605C23C14/022C23C14/06C23C14/32C23C14/02
Inventor 唐永炳闫家肖蒋春磊石磊
Owner SHENZHEN INST OF ADVANCED TECH
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