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Anode hole sealing plug and sealing method thereof

An anode sealing and plugging technology, which is used in the sealing of engines, assembling machines, engine components, etc., can solve the problems of easy falling off of silicone plugs, generation of waste products, loss of processing accuracy of blind holes, etc., and achieves good sealing performance and reliable pressure. The effect of tight force and good air tightness

Inactive Publication Date: 2020-06-19
TORRANCE SEMICON EQUIP QIDONG CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing silica gel plugs are easy to fall off during the anodic sealing process of the workpiece, resulting in loss of processing accuracy in blind holes, and even waste products in severe cases

Method used

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  • Anode hole sealing plug and sealing method thereof

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Embodiment Construction

[0020] In order to better illustrate the implementation details of the present invention, the technical solutions of the present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

[0021] An anode sealing plug, such as figure 1 As shown, it includes a lifting cover 1, a plug 2, an inner plug 3, a spring 4 and a stopper 5. The material of the plug 2 is silica gel; the material of the inner plug 3 is aluminum alloy; the cover 1 covers the left end of the plug 2; the sealing surface 22 of the plug 2 is a conical surface, and the taper of the sealing surface 22 is 1:6. There is a conical hole 21 inside the head 2, and the taper of the conical hole 21 is 1:9; the conical surface 31 of the inner plug 3 matches the conical hole 21 of the plug 2, and the taper of the conical surface 31 is 1:9; the inner plug 3 The right end of the right end is connected with the block 5 through the spring 4, and there is a pre-tightening te...

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Abstract

The invention discloses an anode hole sealing plug and a sealing method thereof, and particularly relates to a sealing structure of a vacuum gate switch valve. The sealing structure comprises a lifting shaft, air cylinders, a valve, a sealing gasket and a valve body, the four air cylinders are mounted on the lifting shaft; the valve is mounted at the movable end of the air cylinder; a dovetail spigot is machined at the right end of the valve; a sealing ring is mounted at the right end of the valve, and a sealing surface of the sealing ring is a planar sealing surface; a micro-texture sealing surface is arranged at the left end of the valve body; in a sealing state, the planar sealing surface of the sealing ring is in contact with the micro-texture sealing surface of the valve body; the four air cylinders are evenly distributed at the four corner points of the valve and directly face the sealing ring. According to the sealing structure, the sealing effect and reliability of the vacuum gate switch valve are greatly improved, and the sealing structure can be applied to sealing of a semiconductor etching reaction cavity.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to an anode plugging technology. Background technique [0002] Anode sealing is a common surface treatment method. For the blind holes that have been processed on the workpiece, in order to ensure the dimensional accuracy, measures must be taken to block the blind holes during anodic sealing. [0003] The existing silica gel plugs are easy to fall off during the anodic sealing process of the workpiece, resulting in the loss of processing accuracy of the blind hole, and even waste products in severe cases. Contents of the invention [0004] The object of the present invention is to provide an anode hole sealing plug and a sealing method thereof, so that blind holes can obtain a reliable sealing effect. [0005] In order to solve the above technical problems, the concrete technical scheme that the present invention adopts is as follows: [0006] An anode sealing plug, compri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P21/00F16J15/02
CPCB23P21/00F16J15/02
Inventor 程石涛牛建新戴峰泽叶云霞任旭东
Owner TORRANCE SEMICON EQUIP QIDONG CO LTD
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